Mu njira zovuta zophikira vacuum,ukhondo wa chipindaZimatsimikiza mwachindunji kuthamanga kwa madzi, kuyera kwa filimu, kumamatira, ndi magwiridwe antchito abwino kwambiri a chinthucho. Kuyeretsa tsiku ndi tsiku sikukwanira kuchotsa zinthu zodetsa zomwe zimasonkhana pakapita nthawi. Chifukwa chake, kuyeretsa nthawi ndi nthawi ndi njira yofunika kwambiri yosungira miyezo yapamwamba yopangira. Nkhaniyi ikufotokoza mwatsatanetsatane njira zaukadaulo ndi mfundo zazikulu zoyeretsera madzi m'zipinda zotsukiramo.
I. Ndondomeko Zokonzekera Kuyeretsa Pasadakhale ndi Chitetezo
Kutulutsa Mpweya ndi Kupatula Mphamvu: Onetsetsani kuti njira zonse zogwirira ntchito zatha ndipo chipindacho chabwezeretsedwa ku mphamvu ya mpweya. Gwiritsani ntchito njira yonse ya Lockout-Tagout kuti mulekanitse magwero onse amagetsi (high voltage, RF, heaters), magetsi, ndi mizere yamadzi, ndikutsimikizira chitetezo cha ntchito.
Kuchotsa Zigawo ndi Kugawa Malo: Chotsani zigawo zonse zamkati zochotseka, monga zogwirira ntchito za substrate, zotsekera, maboti otulutsa mpweya, ma arc cathode, ma baffle, ndi mitu ya masensa a quartz crystal micro monitors. Izi zimagawa chipindacho m'malo awiri akuluakulu oyeretsera: "thupi lalikulu" ndi "zigawo," zomwe zimathandiza kuyeretsa bwino.
Kusanthula Zodetsa: Chitani kafukufuku woyambirira wa mitundu ya zodetsa, zomwe nthawi zambiri zimaphatikizapo:
Zotsalira Zopangidwa ndi Polymerized: Splatter kuchokera ku magwero a PVD kapena evaporants.
Zophimba Zopanda Zachilengedwe: Mafilimu opyapyala omwe amaikidwa pamalo omwe si a pansi pa nthaka (monga makoma a chipinda).
Zotsalira za Mafuta a Pampu Yopopera: Kuipitsidwa ndi hydrocarbon chifukwa cha kugwedezeka kwa madzi kapena kulephera kwa pampu.
Tinthu Toyipa: Fumbi, ulusi, kapena tinthu ta filimu tomwe tadulidwa.
II. Njira Zoyeretsera ndi Kusankha Njira
Njira zoyenera zoyeretsera ziyenera kusankhidwa kutengera zinthu zomwe zili ndi zodetsa, nthawi zambiri kutengera njira zosiyanasiyana kuyambira pakuyeretsa thupi mpaka mankhwala.
Njira Zoyeretsera Thupi
Kuphulika Kouma / Kuphulika kwa Mkanda: Kumagwiritsa ntchito zinthu zopanda mankhwala (monga alumina, sodium bicarbonate) pa mphamvu yolamulidwa kuti zikhudze makoma a chipinda ndi zokutira zolemera. Kumachotsa bwino tinthu tolimba ndi zodetsa zokhuthala, ndikupanga malo ofanana osawoneka bwino.
Ma Wipers Opanda Lint ndi Zosungunulira Zapamwamba: Pa malo akuluakulu omwe ali ndi kuipitsidwa kwakukulu, gwiritsani ntchito ma wipers osalukidwa (monga nsalu za polyester kapena zopanda lint) zonyowa ndi zosungunulira zapamwamba (monga Isopropyl Alcohol, Acetone, kapena ma VOC apadera). Pukutani mbali imodzi kuti mupewe kuipitsa.
Njira Zoyeretsera Mankhwala
Kuyeretsa Zosungunulira: Mafuta ofunikira ndi ma polima ena amatha kukonzedwa pogwiritsa ntchito zosungunulira zinazake kuti zilowe m'madzi kapena kupukutidwa. Kuchotsa kotheratu chosungunulira ndikofunikira pambuyo poyeretsa kuti chisakhale gwero latsopano la kuipitsidwa ndikulepheretsa vacuum kufika.
Kulowetsa ndi Kuchotsa Mankhwala: Imwani zinthu zomwe zachotsedwa mu zochotsa zophimba kapena njira za acidic/alkaline (monga nitric acid, sodium hydroxide) kuti musungunule zophimba ndi ma oxides osapangidwa ndi zinthu zachilengedwe. Yang'anirani mosamala kuchuluka kwa zinthu, kutentha, ndi nthawi yoviika kuti mupewe kuwonongeka kwa substrate. Tsatirani ndi kutsuka bwino pogwiritsa ntchito madzi osapangidwa ndi ayoni ndikuwumitsa mwachangu.
Kutsegula Pamwamba ndi Kusuntha
Pa zipinda zosapanga dzimbiri, njira yothira mpweya ingagwiritsidwe ntchito mutatsuka kwambiri kuti mupange gawo lolimba la chrom oxide, kuonjezera kukana dzimbiri komanso kuchepetsa kuchuluka kwa mpweya wotuluka.
III. Chithandizo ndi Kutsimikizira Pambuyo pa Kuyeretsa
Kuyeretsa kwa Ultrasound: Pazigawo zomwe zili ndi ma geometri ovuta, kuyeretsa kwa ultrasound kumagwiritsa ntchito cavitation kuti ichotse bwino tinthu tating'onoting'ono ta sub-micron kuchokera ku ma micropores ndi ming'alu.
Kuumitsa: Zinthu zonse zotsukidwa ziyenera kuumitsidwa pogwiritsa ntchito nayitrogeni wouma kapena mpweya wopanda mafuta ndipo nthawi yomweyo ziikidwe mu uvuni kuti ziphike pa kutentha koyenera (monga 80-120°C) kuti zichotse chinyezi chomwe chakhudzidwa.
Kukonzanso ndi Kuyang'anira Kutuluka kwa Madzi: Bwezeraninso zinthu zonse zouma ndi zoyera m'chipindamo. Musanapompe madzi, yeretsani chipindamo ndi nayitrogeni woyeretsedwa kwambiri. Yambani makina opompa madzi ndikuyang'anira kutayikira kwa madzi pamalo otayirira kuti muwonetsetse kuti palibe kutuluka kwa madzi pamalo otsekera ndi ma flange.
Kutsimikizira Kuchita Bwino: Chitani kayendedwe kokhazikika ka pompu, kulemba nthawi yothamanga motsutsana ndi nthawi kuyambira yoyipa mpaka yokwera kwambiri, ndikuyerekeza ndi deta yotsuka isanatsukidwe. Kuthamanga kwakukulu kwa maziko ndi kukhazikika kwake ndizomwe zimayesedwa kwambiri kuti muone momwe kuyeretsa kumagwirira ntchito. Kuyesa kopanda kanthu (popanda zinthu zomangira) kungachitike, kutsatiridwa ndi kuyang'anira ndi QCM kapena zida zowunikira pamwamba kuti muwone ngati pali mpweya woipa kapena kutulutsa zinthu zodetsa.
Mapeto
Kuyeretsa mozama chipinda chotsukira mpweya ndi ntchito yolinganiza bwino, osati ntchito yoyeretsa yokha. Zimafuna kuti ogwira ntchito azimvetsetsa bwino njira zodetsa, kugwirizana kwa zinthu, ndi momwe zinthu zimagwirira ntchito. Mwa kukhazikitsa ndi kutsatira mosamalitsa ndondomeko yoyeretsera mozama, kuchuluka kwa zolakwika pakupanga kumatha kuchepetsedwa kwambiri, kubwerezabwereza kwa magwiridwe antchito a filimu yopyapyala, komanso nthawi yogwiritsira ntchito zida imakulitsidwa, potero kuonetsetsa kuti njira yogwirira ntchito ndi kudalirika kwa zinthu pamsika wopikisana.
—Nkhaniyi yafalitsidwa ndi zida zokutira za magnetron sputteringtwopanga Zhenhua Vacuum
Nthawi yotumizira: Okutobala-31-2025