Mu bikorwa bikomeye byo gusiga irangi ry'umwuka uva mu cyuma,isuku y'icyumbabigena neza igitutu cy’ibanze, ubuziranenge bwa firime, gufatana, n’imikorere myiza y’umusaruro. Gusukura buri munsi ntibihagije kugira ngo haveho imyanda ikomeye yakusanyijwe uko igihe kigenda gihita. Bityo, gusukura buri gihe ni igikorwa cy’ingenzi kugira ngo hakomeze kugengwa n’ibipimo byo hejuru by’umusaruro. Iyi ngingo isobanura neza uburyo bw’umwuga n’iby’ingenzi byo gusukura mu byumba bisukuye.
I. Amabwiriza yo gutegura isuku mbere yo kuyisukura no kuyirinda
Gushyiramo umwuka mu buryo butuma amazi asohoka n'amashanyarazi agabanuka: Menya neza ko inzira zose z'ibikorwa zirangiye kandi ko icyumba gisubizwa ku muvuduko w'ikirere. Shyira mu bikorwa uburyo bwose bwo gufunga no gushyiramo ingufu kugira ngo utandukanye amasoko yose y'amashanyarazi (amashanyarazi menshi, RF, amashanyarazi), imiyoboro ya gazi, n'imiyoboro y'amazi, bityo bibe byitezwe ko umutekano ukorwa.
Gukuraho no Gushyira mu mwanya ibice: Kuramo ibice byose by'imbere bishobora gukurwaho, nk'ibikoresho bya substrate, shutters, evaporation boats, arc cathodes, baffles, n'imitwe ya sensor ya quartz crystal micro monitors. Ibi bigabanya icyumba mo ibice bibiri by'ingenzi byo gusukura: "igice cy'ingenzi" n' "ibice," bikoroshya isuku yimbitse.
Isesengura ry'Umwanda: Gukora isuzuma ry'ibanze ry'ubwoko bw'umwanda, muri rusange harimo:
Ibisigazwa bya polymeri: Ibisigazwa biva mu masoko ya PVD cyangwa ibintu biva mu mwuka.
Udupira tw’inyongeramusaruro: Udupira duto dushyirwa ahantu hatari hasi (urugero, inkuta z’icyumba).
Ibisigazwa by'amavuta ya pompe y'umwuka: Umwanda wa hydrocarbon uterwa no gusubira inyuma cyangwa kwangirika kw'ipompe.
Uduce duto tw’imyanda: Ivumbi, imigozi, cyangwa uduce twa firime twakuwemo.
II. Uburyo bwo gusukura no guhitamo inzira
Uburyo bukwiye bwo gusukura bugomba gutoranywa hashingiwe ku byanduza byihariye, akenshi bigakurikiza urukurikirane kuva ku gusukura ku buryo bufatika kugeza ku gukoresha imiti.
Uburyo bwo gusukura umubiri
Guturika byumye / Guturika amasaro: Bikoresha uburyo bworoshye kandi budafite imiti (urugero: alumina, sodium bicarbonate) ku gitutu gigenzurwa kugira ngo bikore ku nkuta z'icyumba n'ibisigazwa biremereye. Bikuraho neza utunyangingo twinshi n'imyanda ikomeye, bigatuma ubuso buhinduka nk'ubw'umutuku.
Udupira two mu bwoko bwa Lint-Free n'udupira two mu bwoko bwa High-Purity: Ku bice binini bifite umwanda rusange, koresha udupira two mu bwoko bwa polyester cyangwa uturindamwanya dutose udupira two mu bwoko bwa Lint-Free) dutose udupira two mu bwoko bwa High-Purity (urugero: Isopropyl Alcohol, Acetone, cyangwa VOCs zihariye). Hanagura mu buryo bumwe kugira ngo wirinde kwandura.
Uburyo bwo gusukura imiti
Gusukura imiyoboro: Amavuta yagenewe na polymer zimwe na zimwe ashobora gukemurwa hakoreshejwe imiyoboro yihariye yo kwibiza cyangwa guhanagura. Gukuraho imiyoboro burundu ni ngombwa nyuma yo kuyisukura kugira ngo wirinde ko iba isoko nshya y’umwanda no kubangamira ikoreshwa ry’imyanda.
Kuroba no Gukuraho Ibinyabutabire: Shyira ibice byakuwemo mu bikoresho byabugenewe byo gusiga cyangwa mu bisubizo bya aside/alkali (urugero: aside nitrique, sodium hydroxide) kugira ngo ushongeshe ibisigazwa na okiside. Genzura neza ubwinshi bw'ibice, ubushyuhe, n'igihe cyo kwinjizwa mu mazi kugira ngo wirinde kwangirika kw'ibice. Kurikiza woge neza ukoresheje amazi yakuwemo ayoni hanyuma wumishe vuba.
Gukora no Gushyira mu bikorwa ubuso
Ku byumba by'icyuma kitagira umugese, hashobora gukoreshwa uburyo bwo gusukura cyane kugira ngo hakorwe urwego rwo kurinda chromooxide, rukongera ubushobozi bwo kurwanya ingese no kugabanya imyuka isohoka.
III. Uburyo bwo kuvura no kugenzura nyuma yo gusukura
Gusukura hakoreshejwe ikoranabuhanga: Ku bice bifite imiterere y’ijimetero igoye, gusukura hakoreshejwe ikoranabuhanga bikoresha uburyo bwo gukaraba kugira ngo bikure neza uduce duto twa micron mu miyoboro mito n’imirongo.
Kumisha: Ibikoresho byose bisukuye bigomba kumyuka hakoreshejwe azote yumye cyangwa umwuka udafite amavuta, hanyuma bigahita bishyirwa mu itanura kugira ngo biteke ku bushyuhe bukwiye (urugero, 80-120°C) kugira ngo bikureho neza ubushuhe bwatewe n’amazi.
Guteranya no kugenzura amazi asohoka: Ongera ushyiremo ibice byose byumye kandi bisukuye mu cyumba. Mbere yo kuvoma, sukura by'agateganyo icyumba ukoresheje azote nziza cyane. Tangira sisitemu yo kuvoma hanyuma ugenzure amazi asohoka cyane ku gice cyo hasi cy'isuku kugira ngo urebe neza ko nta mazi asohoka ku buso bwose bwo gufunga no ku miyoboro ya flange.
Igenzura ry'imikorere: Kora uruziga rusanzwe rwo kugabanya umuvuduko ugereranije n'igihe uhereye ku gipimo cy'umuvuduko ukabije kugeza ku gipimo cy'umuvuduko mwinshi, hanyuma ugereranye n'amakuru mbere yo gusukura. Igipimo cy'umuvuduko w'ibanze n'ubudahangarwa bwawo ni byo bipimo by'ingenzi cyane mu gusuzuma imikorere y'isuku. Gukoresha uburyo bwo gushyiramo umwuka (nta bipimo bya substrate) bishobora gukorwa, hagakurikiraho kugenzura hakoreshejwe QCM cyangwa ibikoresho byo gusesengura ubuso kugira ngo harebwe niba hari imyuka idasanzwe cyangwa isohoka ry'ibintu byanduye.
Umwanzuro
Gusukura icyumba cy’ubukonje ni igikorwa cy’ubuhanga gikozwe mu buryo bunoze kandi bunoze, si igikorwa cyo gusukura gusa. Bisaba ababikora gusobanukirwa neza uburyo bwo kwanduza, guhuza ibikoresho, n’ibipimo by’imikorere. Mu gushyiraho no gukurikiza amabwiriza agenga isuku y’ubukonje, igipimo cy’inenge mu musaruro gishobora kugabanuka cyane, kongera ubushobozi bwo gusubiramo imikorere y’ibikoresho, no kongera igihe cyo gukoresha ibikoresho, bityo bigatuma habaho ubuziranenge n’icyizere ku isoko ry’ipiganwa.
—Iyi nkuru yasohotse na ibikoresho byo gusiga magnetronturuganda rwa Zhenhua Vacuum
Igihe cyo kohereza: Ukwakira-31-2025