Mukuita mabasa ekuputira vacuum,kuchena kwekamuriZvinonyatsoona kumanikidzwa kwepasi, kuchena kwefirimu, kunamira, uye kushanda kwekupedzisira kwechigadzirwa. Kuchenesa zuva nezuva hakukwani kubvisa tsvina inoungana nekufamba kwenguva. Saka, kuchenesa nguva nenguva inzira inokosha yekuchengetedza mwero wepamusoro wekugadzirwa. Chinyorwa chino chinotsanangura zvakarongeka maitiro ehunyanzvi uye zvinhu zvakakosha zvekuchenesa kwakadzika kwemakamuri evacuum.
I. Maitiro Ekugadzirira Kuchenesa Pamberi uye Kuchengetedza
Kubvisa Mafenzi muSisitimu uye Kubvisa Magetsi: Iva nechokwadi chekuti maitikiro ese ekushanda apera uye kuti imba yacho yadzorerwa kumhepo. Shandisa nzira yakazara yeLockout-Tagout kuti uparadzanise manyuko ese emagetsi (high voltage, RF, heaters), gasi, uye migero yemvura, zvichivimbisa kuchengetedzeka kwekushanda.
Kubviswa kweZvikamu uye Kugadzwa kweZvikamu: Bvisa zvese zvikamu zvemukati zvinobviswa, zvakaita sezvibatiso zve substrate, ma shutters, ma evaporation boats, arc cathodes, ma baffles, uye masensor heads e quartz crystal micro monitors. Izvi zvinopatsanura chamber kuita nzvimbo mbiri huru dzekuchenesa: "muviri mukuru" uye "zvikamu," zvichiita kuti zvive nyore kuchenesa zvakanyanya.
Kuongorora Zvinosvibisa: Ita ongororo yekutanga yemhando dzezvinosvibisa, zvinowanzo sanganisira:
Zvisaririra zvakasanganiswa nepolymer: Spratter kubva kuPVD kana evaporants.
Mapendi Asina Kugadzirwa: Mafirimu matete akaiswa panzvimbo dzisina kuumbwa (semuenzaniso, madziro emakamuri).
Zvisaririra zveOiri yePombi yeVacuum: Kusvibiswa kweHydrocarbon nekuda kwekubuda kwemvura kumashure kana kutadza kushanda kwepombi.
Zvidimbu Zvinosvibisa: Guruva, shinda, kana zvidimbu zvefirimu zvakaputsika.
II. Nzira dzekuchenesa uye Kusarudza Maitiro
Nzira dzakakodzera dzekuchenesa dzinofanira kusarudzwa zvichibva pane zvakasvibisa, kazhinji zvichitevera kutevedzana kubva pakuchenesa kwemuviri kusvika kumakemikari.
Nzira Dzekuchenesa Muviri
Kuputika Kwakaoma / Kuputika Kwemabheya: Inoshandisa nzira isina makemikari yakawanda (semuenzaniso, alumina, sodium bicarbonate) nekumanikidzwa kwakaringana kuti irove madziro ekamuri uye machira anorema. Inobvisa zvinobudirira maronda akaomarara uye tsvina hombe, zvichiita kuti pamusoro payo pave nechinhu chakafanana.
MaWipers Asina Lint uye Zvinyungudutsa Zvakanyanya Kuchena: Kune nzvimbo huru dzine kusvibiswa kwakawanda, shandisai mawipers asina kurukwa (semuenzaniso, machira epolyester kana asina lint) akanyoroveswa nezvinyungudutsa zvakanyanya kuchena (semuenzaniso, Isopropyl Alcohol, Acetone, kana maVOC chaiwo). Pukutai nenzira imwe chete kudzivirira kusvibiswa.
Nzira dzekuchenesa Makemikari
Kuchenesa Zvinonyungudutsa: Mafuta akarongwa uye mamwe mapolymer anogona kugadziriswa uchishandisa zvinonyungudutsa zvakati kuti zvinyungudutswe kana kupukutwa. Kubvisa zvachose chinonyungudutsa kunodiwa mushure mekuchenesa kudzivirira kuti chisave chinhu chitsva chinosvibisa uye chinokanganisa kubuda kwechinhu chinopisa.
Kunyikisa nekubvisa zvinhu kubva mumakemikari: Nyudza zvinhu zvakabviswa muzvidzitiro zvemachira kana mumhinduro dzine acidic/alkaline (semuenzaniso, nitric acid, sodium hydroxide) kuti unyungudise machira asina kugadzirwa uye maoxide. Dzora zvakanyanya kuwanda, tembiricha, uye nguva yekunyudza kuti usaora. Tevedzera nekusuka zvakakwana uchishandisa mvura yakabviswa maaroni uye wobva waomesa nekukurumidza.
Kushanda Pamusoro uye Kusagadzikana
Kumakamuri esimbi asingatsvi, mushonga wekupisa unogona kushandiswa mushure mekuchenesa zvakadzama kuti pave nechikamu chekudzivirira che chrom oxide chakakora, zvichiwedzera kuramba ngura uye kuderedza huwandu hwemhepo inobuda.
III. Kurapwa uye Kusimbiswa Mushure meKuchenesa
Kuchenesa kweUltrasonic: Kune zvikamu zvine geometri dzakaoma, kuchenesa kweUltrasonic kunoshandisa cavitation kubvisa zvinobudirira zvidimbu zve sub-micron kubva muma micropores nemaburi.
Kuomesa: Zvinhu zvese zvakacheneswa zvinofanirwa kuomeswa uchishandisa nitrogen yakaoma kana mhepo isina mafuta uye zvinoiswa muovheni kuti zvibikwe patembiricha yakakodzera (semuenzaniso, 80-120°C) kubvisa hunyoro hwakanyungudutswa.
Kuunganidzazve uye Kuongorora Kubuda Kwemvura: Dzorerazve zvinhu zvose zvakaoma uye zvakachena mukamuri. Usati wapomba pasi, chenesa kamuri kwenguva pfupi nenitrogen yakachena kwazvo. Tanga sisitimu yekupomba uye tarisa kudonha kwemvura kwakanyanya padanho re rough vacuum kuti uve nechokwadi chekuti hapana kudonha kwemvura panzvimbo dzese dzekuvhara uye kubatanidza flange.
Kusimbiswa Kwekushanda: Ita purogiramu yekudzikisa pombi, uchinyora pressure vs. time curve kubva pa rough kusvika pa high vacuum, woienzanisa ne pre-cleaning data. Kumanikidzwa kwepasi uye kugadzikana kwayo ndizvo zvinonyanya kukosha pakuongorora kushanda kwekuchenesa. Kuisa bhora risina chinhu (pasina substrates) kunogona kuitwa, zvichiteverwa nekutarisa neQCM kana zvishandiso zvekuongorora pamusoro pechinhu chero chipi zvacho chisina kuchena kana kuburitsa tsvina.
Mhedziso
Kuchenesa chamber ye vacuum cleaner kwakadzika ibasa rekugadzira zvinhu nemazvo, kwete basa rekuchenesa chete. Zvinoda kuti vashandi vanzwisise zvakadzama nzira dzekusvibisa, kuenderana kwezvinhu, uye maitiro ekugadzira. Nekutanga uye kutevedzera zvakanyanya mutemo wekuchenesa chakadzika, mwero wezvikanganiso mukugadzirwa unogona kuderedzwa zvakanyanya, kudzokorora kwekushanda kwefirimu rakatetepa kunowedzerwa, uye hupenyu hwebasa remidziyo hunowedzera, nokudaro zvichiita kuti chigadzirwa chive chepamusoro uye chakavimbika mumusika wemakwikwi.
—Nyaya iyi yakaburitswa na magnetron sputtering coating equipmentmentmugadziri Zhenhua Vacuum
Nguva yekutumira: Gumiguru-31-2025