1) Iithagethi zeCylindrical zinezinga eliphezulu lokusetyenziswa kuneenjongo zeplani. Kwinkqubo yokwaleka, nokuba luhlobo lwe-rotary magnetic okanye i-rotary tube type cylindrical sputtering target, zonke iinxalenye zomphezulu wetyhubhu ekujoliswe kuyo ngokuqhubekayo zidlula kwindawo yokutshiza eyenziwe phambi kwemagnethi esisigxina ukufumana i-cathode sputtering, kunye nethagethi inokutshitshiswa ngokufanayo, kunye nesantya sokusetyenziswa okuphezulu. Izinga lokusetyenziswa kwezinto ekujoliswe kuzo limalunga nama-80% ~ 90%.
I-2) Iithagethi ze-Cylindrical aziyi kuba lula ukuvelisa "ityhefu ekujoliswe kuyo". Ngethuba lenkqubo yokugquma, umphezulu wetyhubhu ekujoliswe kuyo uhlala uhlanjululwa kwaye ugxininiswe yi-ion, kwaye akulula ukuqokelela i-oxides engqingqwa kunye nezinye iifilimu ezikhuselayo phezu komhlaba, kwaye akulula ukuvelisa "ityhefu ekujoliswe kuyo".
3) Isakhiwo se-rotary target tube type cylindrical sputtering target ilula kwaye kulula ukuyifaka.
I-4) I-cylindrical target target material ineentlobo ezahlukeneyo. iplani ekujoliswe kuyo ngentsimbi ekujoliswe ngokuthe ngqo ukupholisa amanzi, kwaye ezinye azikwazi ukucutshungulwa kwaye zenze iithagethi cylindrical, ezifana In2-SnO2 ekujoliswe, njl kunye izinto umgubo ukucinezela isostatic eshushu ukufumana iithagethi ipleyiti-ezifana, kuba ubungakanani ayinakwenziwa enkulu, kwaye brittle, ngoko ke kuyimfuneko ukusebenzisa indlela yokuqhafaza kunye neplate yobhedu ukudibanisa uze ufakele kwisiseko ekujoliswe kuyo. Ukongeza kwimibhobho yetsimbi, iithagethi zekholomu nazo ziyakwazi ukutshizwa phezu kweepayipi zensimbi ezingenasici kunye nezixhobo ezahlukeneyo ezifunekayo ukuba zifakwe, ezifana neSi, Cr, njl.
Okwangoku, umlinganiselo weethagethi ze-cylindrical zokwaleka kwimveliso yoshishino iyanda. Iithagethi zeCylindrical azisebenzisi kuphela umatshini wokwambathisa othe nkqo kodwa zikwasebenzisa kumqulu wokuqengqeleka umatshini wokugquma. Kwiminyaka yakutshanje, iithagethi zamawele ezicwangcisiweyo zitshintshwa ngokuthe ngcembe ziithagethi zamawele eCylindrical.
——Eli nqaku likhutshwe nguGuangdong Zhenhua Technology, aumenzi woomatshini bokwaleka optical.
Ixesha lokuposa: May-11-2023