(4) Chinyorwa chinonangidzirwa. Target zvinhu ndiyo kiyi yekuputira sputtering, kazhinji, chero chinhu chinotarirwa chichisangana nezvinodiwa, uye kudzora kwakasimba kweiyo maitiro paramita inogona kudiwa kuti uwane iyo firimu layer. Tsvina muzvinhu zvakanangwa uye maokisi epamusoro uye zvimwe zvinhu zvisina kuchena ndizvo zvakakosha pakusvibiswa kwefirimu, saka kuti uwane yakakwira kuchena layer, kunze kwekushandiswa kwepamusoro kuchena kunonangwa zvinhu, mukupopota kwega kwega kunofanira kunge kuri kwekutanga kunangwa kwepre-sputtering kuitira kuchenesa pamusoro pechinangwa, kubvisa chinangwa cheiyo oxide layer.
(5) Background vacuum. Iyo nhanho yevacuum yekumashure inoratidza zvakananga huwandu hwegasi rasara muhurongwa, uye gasi rakasara zvakare yakakosha sosi yekusvibiswa kweiyo firimu layer, saka iyo yekumashure vacuum inofanirwa kuvandudzwa zvakanyanya sezvinobvira. Pakusvibiswa kwerimwe dambudziko ipombi yekuparadzira mafuta inodzokera kuoiri, zvichikonzera kabhoni doping mu membrane, izvo zvakanyanya kuomarara zvinodiwa zve membrane zvinofanirwa kutora matanho akakodzera kana kushandiswa kwemafuta-isina high-vacuum kupomba system.
(6) kupfapfaidza mhepo yemhepo. Iko kushanda kwemhepo kudzvinyirira kunokanganisa zvakananga deposition rate ye membrane.
Uye zvakare, nekuda kweakasiyana sputtering zvishandiso mumunda wemagetsi, mhepo, inotarirwa zvinhu, substrate tembiricha uye geometric chimiro cheiyo parameter yekudyidzana pakati pe membrane kuti ibudise zvinodiwa, zvinodikanwa kuita zviedzo pazviyereso zvemaitiro, kubva kune yakanakisa maitiro mamiriro.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Jan-05-2024