1) Zvinangwa zvecylindrical zvine chiyero chepamusoro chekushandisa pane zvakarongwa. Mukuita kwekuputira, ingave iri rotary magineti mhando kana inotenderera chubhu mhando cylindrical sputtering tarisiro, nzvimbo dzese dzepamusoro pechinongedzerwa chubhu dzinoramba dzichipfuura nepakati penzvimbo yekupopotera inogadzirwa pamberi pegineti isingaperi kuti igamuchire cathode sputtering, uye chinangwa chinogona kuita chakafanana chakaiswa, uye chiyero chekushandisa chakakwira. Chiyero chekushandiswa kwezvinhu zvinotarirwa chinenge 80% ~ 90%.
2) Zvinangwa zvecylindrical hazvisi nyore kugadzira "chinangwa chepfu". Munguva yekuputira, pamusoro pechubhu inotarirwa inogara ichipushwa uye yakatemwa neiyoni, uye hazvisi nyore kuunganidza maokisi akakora uye mamwe mafirimu anodzivirira pamusoro, uye hazvisi nyore kugadzira "chinangwa chepfu".
3) Mamiriro eiyo rotary target tube type cylindrical sputtering target iri nyore uye iri nyore kuisa.
4) Iyo cylindrical target tube material ine marudzi akasiyana-siyana. planar chipfuro chine simbi chipfuro chakananga kutonhora kwemvura, uye zvimwe hazvigone kugadziriswa uye kuumbwa cylindrical targets, senge In2-SnO2 target, etc. neupfu zvinhu zvekupisa isostatic kudzvanya kuwana ndiro-yakafanana nezvinangwa, nekuti saizi haigoni kuitwa yakakura, uye brittle, saka zvinodikanwa kushandisa brazing nzira uye backplate yemhangura kuti isanganise uye wozoisa pachigadziko. Pamusoro pemapombi esimbi, zvibodzwa zve columnar zvinogona zvakare kupfapfaidzwa pamusoro pemapombi esimbi isina tsvina nezvinhu zvakasiyana zvinoda kuvharwa, seSi, Cr, nezvimwe.
Parizvino, chikamu chechinangwa checylindrical chekuputira mukugadzirwa kwemaindasitiri chiri kuwedzera. Cylindrical targets haingo shandisa chete vertical coating muchina asi zvakare shandisa mupumburu kukungurusa coating muchina. Mumakore achangopfuura, mapatya anorongana anotsiviwa zvishoma nezvishoma neCylindrical mapatya zvinangwa.
——Chinyorwa ichi chakaburitswa naGuangdong Zhenhua Technology, amugadziri we optical coating machines.
Nguva yekutumira: May-11-2023