1) Intego za Cylindrical zifite igipimo cyinshi cyo gukoresha kuruta intego za planari. Muburyo bwo gutwikira, bwaba ari ubwoko bwa magnetique buzunguruka cyangwa intego ya rotine yo mu bwoko bwa silindrike yo gusunika, ibice byose byubuso bwigitereko cyumuvuduko bikomeza kunyura ahantu hasohoka imbere ya magneti ahoraho kugirango yakire cathode, kandi intego irashobora guterwa kimwe, kandi igipimo cyo gukoresha ni kinini. Igipimo cyo gukoresha ibikoresho bigenewe ni 80% ~ 90%.
2) Intego za cylindrical ntizoroshye kubyara "uburozi bwintego". Mugihe cyo gutwikira, ubuso bwigitereko bugenewe buri gihe gusukwa no guterwa na ion, kandi ntibyoroshye kwegeranya okiside yibyibushye hamwe nizindi firime zikingira hejuru, kandi ntabwo byoroshye kubyara "uburozi bwintego".
3) Imiterere ya rotary target tube ya silindrical sputtering intego iroroshye kandi yoroshye kuyishyiraho.
4) Ibikoresho bya silindrike yibikoresho bifite ubwoko butandukanye. intego ya planar hamwe nicyuma giteganijwe gukonjesha amazi, kandi bimwe ntibishobora gutunganywa no gushingwa intego ya silindrike, nka In2-SnO2 intego, nibindi hamwe nibikoresho byifu ya isostatike ishyushye kugirango ibone intego zisahani, kuko ubunini ntibushobora kuba bunini, kandi buvunika, bityo rero birakenewe gukoresha uburyo bwa brazing hamwe numuringa winyuma kugirango uhuze hanyuma ushyire kumurongo fatizo. Usibye imiyoboro yicyuma, intego yinkingi irashobora kandi guterwa hejuru yimiyoboro idafite ibyuma hamwe nibikoresho bitandukanye bigomba gutwikirwa, nka Si, Cr, nibindi.
Kugeza ubu, igipimo cy’intego za silindrique zo gutwikira mu nganda ziyongera. Intego ya cylindrical ntabwo ikoreshwa gusa kumashini ihagaritse gusa ahubwo inakoresha mumuzingo kugirango imashini itwikire. Mumyaka yashize, planar twin intego zasimbuwe buhoro buhoro na Cylindrical twin intego.
——Iyi ngingo yasohowe na tekinoroji ya Guangdong Zhenhua, auruganda rukora imashini nziza.
Igihe cyo kohereza: Gicurasi-11-2023