1) Ebumnuche cylindrical nwere ọnụego ojiji dị elu karịa ebumnuche atụmatụ. N'ime usoro mkpuchi ahụ, ma ọ bụ ụdị magnetik rotary ma ọ bụ ụdị rotary tube ụdị cylindrical sputtering target, akụkụ niile nke elu nke tube ebu n'uche na-aga n'ihu na-agafe ebe a na-agbapụta n'ihu magnet na-adịgide adịgide iji nweta sputtering cathode, na ihe mgbaru ọsọ nwere ike ịgbanye n'otu n'otu, na ọnụ ọgụgụ nke itinye n'ọrụ dị elu. Ọnụego ojiji nke ebumnuche ebumnuche bụ ihe dịka 80% ~ 90%.
2) Ebumnuche cylindrical agaghị adị mfe ịmepụta "nsi e lekwasịrị anya". N'oge usoro mkpuchi ahụ, a na-efesa elu nke tube a na-atụ anya mgbe niile ma na-agbanye ya site na ions, ọ dịghịkwa mfe ịkwakọba nnukwu oxides na ihe nkiri ndị ọzọ na-ekpuchi ihe n'elu, ọ dịghịkwa mfe ịmepụta "nsi na-egbu egbu".
3) Ọdịdị nke rotary target tube ụdị cylindrical sputtering lekwasịrị anya dị mfe ma dị mfe ịwụnye.
4) The cylindrical lekwasịrị tube ihe nwere dị iche iche ụdị. planar lekwasịrị anya na metal lekwasịrị kpọmkwem mmiri obi jụrụ, na ụfọdụ enweghị ike esichara na kpụrụ cylindrical lekwasịrị, dị ka In2-SnO2 lekwasịrị, wdg na ntụ ntụ ihe maka ọkụ isostatic ịpị iji nweta efere-dị ka zaa, n'ihi na size enweghị ike ime ka nnukwu, na kenkuwa, n'ihi ya, ọ dị mkpa iji brazing usoro na ọla kọpa backplate ijikọ na mgbe ahụ wụnye na lekwasịrị isi. Na mgbakwunye na ọkpọkọ ígwè, a pụkwara ịgbasa ihe ndị a na-atụ anya columnar n'elu ọkpọkọ igwe anaghị agba nchara na ihe dị iche iche dị mkpa ka a na-ekpuchi ya, dị ka Si, Cr, wdg.
Ka ọ dị ugbu a, ọnụọgụ nke ebumnuche cylindrical maka mkpuchi na mmepụta mmepụta ihe na-abawanye. Ebumnuche cylindrical ọ bụghị naanị maka igwe mkpuchi kwụ ọtọ kamakwa ọ na-ejikwa mpịakọta mpịakọta igwe mkpuchi. N'afọ ndị na-adịbeghị anya, ndị ejima Cylindrical na-eji nke nta nke nta dochie atụmatụ ejima planar.
——Ndị teknụzụ Guangdong Zhenhua wepụtara akụkọ a, aemeputa igwe mkpuchi anya.
Oge nzipu: Mee-11-2023