(4) Abun manufa. Abubuwan da aka yi niyya shine maɓallin sputtering shafi, a gaba ɗaya, idan dai abin da aka yi niyya ya cika buƙatun, kuma ana iya buƙatar tsauraran matakan aiwatar da sigogi don samun fim ɗin fim. Najasa a cikin kayan da aka yi niyya da oxides da sauran abubuwan da ba su da kyau suna da mahimmancin tushen gurɓataccen fim, don haka don samun babban tsafta mai tsabta, ban da yin amfani da babban abin da ake nufi da tsarki, a cikin kowane sputtering ya kamata ya zama farkon manufa don riga-kafi don tsaftace farfajiyar manufa, don cire maƙasudin farfajiyar oxide Layer.
(5) Bakin bayan gida. Matsayin ƙarancin baya kai tsaye yana nuna adadin iskar gas ɗin da ke cikin tsarin, kuma ragowar iskar gas kuma muhimmin tushen gurɓata fim ɗin fim ne, don haka ya kamata a inganta injin baya kamar yadda zai yiwu. Akan gurbatar wata matsala ita ce famfon watsa mai ya koma mai, wanda ke haifar da sinadarin carbon doping a cikin membrane, mafi tsananin bukatu na membrane ya kamata a dauki matakan da suka dace ko kuma amfani da tsarin bututun mai mara nauyi.
(6) matsewar iska. Matsin iska mai aiki yana tasiri kai tsaye ƙimar ajiya na membrane.
Bugu da ƙari, saboda daban-daban sputtering na'urorin a cikin lantarki filin, yanayi, manufa abu, substrate zafin jiki da kuma tsarin geometric na sigogi na hulda tsakanin membrane don samar da bukatun, shi wajibi ne don yin gwaje-gwaje a kan sigogi na tsari, daga abin da mafi kyau tsari yanayi.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Janairu-05-2024