Ubuchwepheshe be-CVD busekelwe ekusabeleni kwamakhemikhali. Ukusabela lapho ama-reactant esesimweni segesi kanti omunye wemikhiqizo usesimeni esiqinile kuvame ukubizwa ngokuthi ukusabela kwe-CVD, ngakho-ke uhlelo lwawo lokusabela kwamakhemikhali kumele lufeze lezi zimo ezintathu ezilandelayo.
(1) Ekushiseni kokufakwa, ama-reactant kumele abe nomfutho womusi ophezulu ngokwanele. Uma ama-reactant wonke enegesi ekushiseni kwegumbi, idivayisi yokufaka ilula kakhulu, uma ama-reactant eguquguqukayo ekushiseni kwegumbi incane kakhulu, idinga ukushiswa ukuze ishintshe, futhi ngezinye izikhathi kudingeka kusetshenziswe igesi yokuthwala ukuyiletha ekamelweni lokusabela.
(2) Emikhiqizweni yokusabela, zonke izinto kumele zibe sesimweni segesi ngaphandle kwediphozithi efiselekayo, esesimweni esiqinile.
(3) Umfutho womusi wefilimu efakiwe kufanele ube phansi ngokwanele ukuqinisekisa ukuthi ifilimu efakiwe inamathele ngokuqinile ku-substrate enezinga lokushisa elithile lokufakwa ngesikhathi sokusabela kokufakwa. Umfutho womusi wezinto ze-substrate ekushiseni kokufakwa kumele futhi ube phansi ngokwanele.
Ama-reactant okufaka ahlukaniswe abe yizimo ezintathu eziyinhloko ezilandelayo.
(1) Isimo segesi. Izinto zomthombo ezisebenzisa igesi ekushiseni kwegumbi, njenge-methane, i-carbon dioxide, i-ammonia, i-chlorine, njll., ezilungele kakhulu ukufakwa komphunga wamakhemikhali, futhi izinga lokugeleza lilawulwa kalula.
(2) Uketshezi. Ezinye izinto zokusabela ekushiseni kwegumbi noma ekushiseni okuphezulu kancane, kukhona umfutho ophezulu womusi, njenge-TiCI4, i-SiCl4, i-CH3SiCl3, njll., zingasetshenziswa ukuthwala igesi (njenge-H2, i-N2, i-Ar) igeleza ebusweni boketshezi noma uketshezi ngaphakathi kwebhamuza, bese ithwala umusi ogcwele walesi sici uyiyise esitudiyo.
(3) Isimo esiqinile. Uma kungekho mthombo ofanele wegesi noma uketshezi, kungasetshenziswa izitokwe zesimo esiqinile kuphela. Ezinye izakhi noma ama-compounds azo ngama-degree angamakhulu anomfutho omkhulu womusi, njenge-TaCl5, i-Nbcl5, i-ZrCl4, njll., angathwalwa ayiswe esitudiyo kusetshenziswa igesi ethwalayo efakwe ungqimba lwefilimu.
Isimo esivame kakhulu ukuthayipha ngegesi ethile kanye nokusabela kwegesi okuqinile noma uketshezi lwegesi, ukwakheka kwezingxenye ezifanele zegesi ekulethweni kwesitudiyo. Isibonelo, igesi ye-HCl kanye ne-Ga yensimbi kusabela ukwakha ingxenye yegesi i-GaCl, ethuthwa esitudiyo ngesimo se-GaCl.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Novemba-16-2023