Itekhnoloji ye-CVD isekelwe kwimpendulo yamakhemikhali. Impendulo apho ii-reactants zikwimeko yegesi kwaye enye yeemveliso zikwimeko eqinileyo idla ngokubizwa ngokuba yi-CVD reaction, ngoko ke inkqubo yayo ye-chemical reaction kufuneka izalisekise ezi meko zintathu zilandelayo.
(1) Kwiqondo lobushushu bokufaka, ii-reactants kufuneka zibe noxinzelelo lomphunga oluphezulu ngokwaneleyo. Ukuba zonke ii-reactants zinomoya kubushushu begumbi, isixhobo sokufaka silula kakhulu, ukuba ii-reactants zinomoya oguquguqukayo kubushushu begumbi sincinci kakhulu, kufuneka sifudunyezwe ukuze sitshintshe, kwaye ngamanye amaxesha kufuneka kusetyenziswe igesi yokuthwala ukuyizisa kwigumbi lokusabela.
(2) Kwiimveliso ze-reaction, zonke izinto kufuneka zibe kwimeko yegesi ngaphandle kwediphozithi efunekayo, ekwimeko eqinileyo.
(3) Uxinzelelo lomphunga wefilimu egciniweyo kufuneka lube phantsi ngokwaneleyo ukuqinisekisa ukuba ifilimu egciniweyo inamathele ngokuqinileyo kwisiseko esinobushushu obuthile bokubeka ngexesha lokusabela kokubeka. Uxinzelelo lomphunga wezinto zesiseko kwiqondo lobushushu bokubekayo nalo kufuneka libe phantsi ngokwaneleyo.
Ii-reactants zokubeka izinto zahlulwe zibe ziimeko ezintathu eziphambili ezilandelayo.
(1) Imeko yegesi. Izinto ezifumaneka kwimithombo yegesi kubushushu begumbi, ezifana ne-methane, i-carbon dioxide, i-ammonia, i-chlorine, njl.njl., ezilungele kakhulu ukufunxwa komphunga weekhemikhali, kwaye isantya sokuhamba kwamanzi silawulwa lula.
(2) Ulwelo. Ezinye izinto ezisabelayo kubushushu begumbi okanye kubushushu obuphezulu kancinci, kukho uxinzelelo oluphezulu lomphunga, olufana neTiCI4, SiCl4, CH3SiCl3, njl., zingasetyenziselwa ukuthwala igesi (efana neH2, N2, Ar) idlula kumphezulu wolwelo okanye ulwelo olungaphakathi kwiqamza, ize emva koko ithwale umphunga ogcweleyo wento iye kwistudiyo.
(3) Imeko eqinileyo. Xa kungekho mthombo wegesi okanye ulwelo ofanelekileyo, kuphela izitokhwe ze-solid-state ezinokusetyenziswa. Ezinye izinto okanye iikhompawundi zazo ezikwii-degrees ezingamakhulu zinoxinzelelo olukhulu lomphunga, njengeTaCl5, Nbcl5, ZrCl4, njl.njl., zinokuthwalwa ziye kwistudiyo kusetyenziswa igesi ethwalayo efakwe kumaleko wefilimu.
Imeko eqhelekileyo kakhulu yi-gas ethile kunye ne-gas-solid okanye i-gas-liquid reaction, ukwakheka kwezinto ezifanelekileyo ze-gaseous kwi-studio delivery. Umzekelo, i-HCl gas kunye ne-metal Ga reacts ukuze zenze i-gaseous component GaCl, ethunyelwa kwi-studio ngendlela ye-GaCl.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Novemba-16-2023