Mfundo zogwirira ntchito zaukadaulo wa CVD

Ukadaulo wa CVD umachokera pa reaction ya mankhwala. Kachitidwe kamene ma reactants ali mu mkhalidwe wa gaseous ndipo chimodzi mwa zinthuzo chili mu mkhalidwe wolimba nthawi zambiri chimatchedwa CVD reaction, chifukwa chake dongosolo lake la reaction ya mankhwala liyenera kukwaniritsa zinthu zitatu zotsatirazi.

(1) Pa kutentha kwa malo osungira, ma reactants ayenera kukhala ndi mphamvu yokwanira ya nthunzi. Ngati ma reactants onse ali ndi mpweya kutentha kwa chipinda, chipangizo chosungiramo chimakhala chosavuta, ngati ma reactants ndi osinthasintha kutentha kwa chipinda ndi chochepa kwambiri, chimayenera kutenthedwa kuti chikhale chosinthasintha, ndipo nthawi zina chimayenera kugwiritsa ntchito mpweya wonyamulira kuti chibweretse ku chipinda chochitiramo zinthu.
(2) Pa zinthu zomwe zimayambitsa vutoli, zinthu zonse ziyenera kukhala mu mkhalidwe wa mpweya kupatula malo omwe mukufuna, omwe ali mu mkhalidwe wolimba.
(3) Kuthamanga kwa nthunzi kwa filimu yosungidwayo kuyenera kukhala kotsika mokwanira kuti zitsimikizire kuti filimu yosungidwayo yalumikizidwa mwamphamvu ku substrate yokhala ndi kutentha kwina kwa kuyikapo panthawi ya kuyikapo. Kuthamanga kwa nthunzi kwa zinthu za substrate pa kutentha kwa kuyikapo kuyeneranso kukhala kotsika mokwanira.
Ma reactants oyika zinthu amagawidwa m'magulu atatu akuluakulu otsatirawa.
(1) Mkhalidwe wa mpweya. Zinthu zomwe zili ndi mpweya kutentha kwa chipinda, monga methane, carbon dioxide, ammonia, chlorine, ndi zina zotero, zomwe zimathandiza kwambiri kuti nthunzi ya mankhwala isungidwe, ndipo zomwe zimapangitsa kuti kuyenda kwa madzi kuyende bwino.
(2) Madzi. Zinthu zina zomwe zimachitika kutentha kwa chipinda kapena kutentha kwakukulu pang'ono, pali kuthamanga kwa nthunzi, monga TiCI4, SiCl4, CH3SiCl3, ndi zina zotero, zingagwiritsidwe ntchito kunyamula mpweya (monga H2, N2, Ar) kudutsa pamwamba pa madzi kapena madzi mkati mwa thovu, kenako nkunyamula nthunzi yodzaza ya chinthucho kupita nayo ku studio.
(3) Mkhalidwe wolimba. Ngati palibe mpweya wabwino kapena madzi, zinthu zolimba zokha ndi zomwe zingagwiritsidwe ntchito. Zinthu zina kapena zinthu zake m'madigiri mazana ambiri zimakhala ndi mphamvu yayikulu ya nthunzi, monga TaCl5, Nbcl5, ZrCl4, ndi zina zotero, zimatha kunyamulidwa kupita ku studio pogwiritsa ntchito mpweya wonyamulira womwe umayikidwa mu filimu.
Zinthu zomwe zimachitika kawirikawiri kudzera mu mpweya winawake ndi gwero la mpweya wolimba kapena wamadzimadzi a gasi, kupangidwa kwa zigawo zoyenera za mpweya kuti ziperekedwe mu studio. Mwachitsanzo, mpweya wa HCl ndi Ga wachitsulo zimachitapo kanthu kuti zipange gawo la mpweya wa GaCl, lomwe limatumizidwa ku studio mu mawonekedwe a GaCl.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua