Ikoranabuhanga rya CVD rishingiye ku buryo ibintu bihinduka mu buryo bwa chimique. Uburyo ibintu bihinduka mu buryo bwa chimique biba biri mu buryo bwa gaze kandi kimwe mu bicuruzwa bikaba biri mu buryo bukomeye, ubusanzwe byitwa uburyo bwa CVD, bityo sisitemu yabyo ya chimique igomba kuzuza ibi bikurikira bitatu.
(1) Ku bushyuhe bwo gushyiramo umwuka, ibikoresho bigomba kugira umuvuduko uhagije w’umwuka. Niba ibikoresho byose bifite umwuka ku bushyuhe bw’icyumba, igikoresho cyo gushyiramo umwuka cyoroshye, niba ibikoresho bifite umwuka uhindagurika ku bushyuhe bw’icyumba ni gito cyane, bigomba gushyuha kugira ngo bihinduke, kandi rimwe na rimwe bisaba gukoresha umwuka utwara umwuka kugira ngo ubijyane mu cyumba cy’ibikorwa.
(2) Mu bicuruzwa bya reaction, ibintu byose bigomba kuba biri mu miterere ya gaze uretse ingano yifuzwa, iri mu miterere ikomeye.
(3) Umuvuduko w'umwuka w'icyuma gitwikiriye ukwiye kuba muto bihagije kugira ngo icyuma gitwikiriye gifatanye neza n'icyuma gifite ubushyuhe runaka mu gihe cyo gushyiramo umwuka. Umuvuduko w'umwuka w'icyuma gitwikiriye ukwiye kuba muto bihagije.
Ibikoresho byo gushyiramo umwuka bigabanyijemo ibice bitatu by'ingenzi bikurikira.
(1) Imiterere y'umwuka. Ibikoresho bifite umwuka mu bushyuhe bw'icyumba, nka methane, dioxyde de carbone, ammonia, chlorine, nibindi, byoroshye cyane mu gushyira umwuka mu by'ubutabire, kandi bigatuma umuvuduko w'amazi ugenzurwa byoroshye.
(2) Amazi. Ibintu bimwe na bimwe bikoreshwa mu gukora ibintu mu bushyuhe bw'icyumba cyangwa ubushyuhe buri hejuru gato, hari umuvuduko mwinshi w'umwuka, nka TiCI4, SiCl4, CH3SiCl3, nibindi, bishobora gukoreshwa mu gutwara umwuka (nka H2, N2, Ar) unyura hejuru y'amazi cyangwa amazi ari mu gitereko, hanyuma bigatwara umwuka wuzuye w'ibintu muri studio.
(3) Imiterere ikomeye. Iyo nta gaze cyangwa amazi ahagije ahari, ni byo byonyine bishobora gukoreshwa. Ibintu bimwe na bimwe cyangwa imvange yabyo mu rugero rw'amagana bifite umuvuduko mwinshi w'umwuka, nka TaCl5, Nbcl5, ZrCl4, nibindi, bishobora kwinjizwa muri studio hakoreshejwe umwuka utwara ibintu ushyizwe mu gice cya firime.
Uburyo bukunze kugaragara cyane binyuze muri gaze runaka n'uburyo ikomokamo gaze ikomeye cyangwa gaze-amazi, ni uko hakorwa ibice by'umwuka bikwiye kugira ngo studio itange. Urugero, gaze ya HCl na Ga byuma bikora kugira ngo bikore igice cy'umwuka cya GaCl, kijyanwa muri studio mu buryo bwa GaCl.
–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua
Igihe cyo kohereza: Ugushyingo-16-2023