Theknoloji ea CVD e thehiloe karabelong ea lik'hemik'hale. Karabelo eo li-reactant li leng boemong ba khase 'me e' ngoe ea lihlahisoa e le boemong bo tiileng hangata e bitsoa karabelo ea CVD, ka hona sistimi ea eona ea karabelo ea lik'hemik'hale e tlameha ho phethahatsa maemo a mararo a latelang.
(1) Mochesong oa ho beha lintho, li-reactant li lokela ho ba le khatello e phahameng ea mouoane ka ho lekaneng. Haeba li-reactant kaofela li le khase mochesong oa kamore, sesebelisoa sa ho beha lintho se bonolo haholo, haeba li-reactant li fetoha mochesong oa kamore se senyenyane haholo, se hloka ho futhumatsoa ho se etsa hore se feto-fetohe, 'me ka linako tse ling se hloka ho sebelisa khase ea mojari ho e tlisa kamoreng ea karabelo.
(2) Ho dihlahiswa tsa karabelo, dintho tsohle di lokela ho ba boemong ba kgase ntle le depositi e lakatsehang, e leng boemong bo tiileng.
(3) Khatello ea mouoane ea filimi e kentsoeng e lokela ho ba tlase ho lekana ho netefatsa hore filimi e kentsoeng e khomaretsoe ka thata ho substrate e nang le mocheso o itseng oa ho kenngoa nakong ea karabelo ea ho kenngoa. Khatello ea mouoane ea thepa ea substrate mochesong oa ho kenngoa le eona e lokela ho ba tlase ka ho lekaneng.
Li-reactant tsa deposition li arotsoe ka maemo a mararo a maholo a latelang.
(1) Boemo ba khase. Lisebelisoa tsa mohloli tse nang le khase mochesong oa kamore, tse kang methane, carbon dioxide, ammonia, chlorine, jj., tse thusang haholo ho kenngoa ha mouoane oa lik'hemik'hale, 'me seo sekhahla sa phallo se laoloang habonolo bakeng sa sona.
(2) Metsi. Dintho tse ding tse arabelang mochesong wa kamore kapa mochesong o phahameng hanyane, ho na le kgatello e phahameng ya mouoane, jwalo ka TiCI4, SiCl4, CH3SiCl3, jj., di ka sebediswa ho jara kgase (jwalo ka H2, N2, Ar) e phallang hodima mokelikeli kapa mokelikeli o ka hare ho bubble, ebe e jara mouoane o kgotsheng wa ntho eo ho ya studio.
(3) Boemo bo tiileng. Ha ho se na mohlodi o loketseng wa kgase kapa mokelikeli, ke di-feedstock tsa boemo bo tiileng feela tse ka sebediswang. Dikarolo tse ding kapa metswako ya tsona ka di-degree tse makgolo di na le kgatello e kgolo ya mouwane, jwalo ka TaCl5, Nbcl5, ZrCl4, jj., di ka iswa studio ho sebediswa kgase e jereng e kentsweng ka hara lera la filimi.
Boemo bo atileng haholo bo thaepa ka khase e itseng le karabelo ea mohloli oa khase-tiileng kapa khase-metsi, ho thehoa ha likarolo tse loketseng tsa khase ho isa phanong ea studio. Mohlala, khase ea HCl le Ga ea tšepe lia arabela ho theha karolo ea khase ea GaCl, e isoang studio ka mokhoa oa GaCl.
–Sengoloa sena se lokollotsoe kemoetsi oa mochini oa ho roala ka vacuum cleanerGuangdong Zhenhua
Nako ea poso: Pulungoana-16-2023