Fasahar CVD ta dogara ne akan amsawar sinadarai. Reactions ɗin da reactants ke cikin yanayin iskar gas kuma ɗayan samfuran yana cikin yanayin tauri yawanci ana kiransa CVD reaction, don haka tsarin amsawar sinadarai dole ne ya cika waɗannan sharuɗɗa uku.
(1) A yanayin zafin da aka ajiye, dole ne sinadaran da ke cikin sinadaran su kasance suna da isasshen matsin lamba mai yawa. Idan sinadaran da ke cikin sinadaran duk suna da iskar gas a yanayin zafin ɗaki, na'urar adanawa tana da sauƙi, idan sinadaran da ke cikin sinadaran suna da ƙarfi sosai a yanayin zafin ɗaki ƙarami ne, ana buƙatar a dumama ta don ta zama mai ƙarfi, kuma wani lokacin ana buƙatar amfani da iskar gas mai ɗaukar kaya don kawo ta ɗakin amsawa.
(2) Daga cikin kayayyakin amsawa, dukkan abubuwa dole ne su kasance a cikin yanayin iskar gas sai dai wurin da ake so a ajiye, wanda yake cikin yanayin tauri.
(3) Matsin tururin fim ɗin da aka ajiye ya kamata ya zama ƙasa da yadda zai tabbatar da cewa an haɗa fim ɗin da aka ajiye sosai da wani abu mai zafin ajiya yayin amsawar shigarwa. Matsin tururin kayan substrate a zafin shigarwa dole ne ya kasance ƙasa da yadda ya kamata.
An raba sinadaran da ke cikin na'urar adana bayanai zuwa manyan jihohi uku masu zuwa.
(1) Yanayin Iskar Gas. Abubuwan da ake samu daga iskar gas a zafin ɗaki, kamar methane, carbon dioxide, ammonia, chlorine, da sauransu, waɗanda suka fi dacewa da ajiyar tururin sinadarai, kuma waɗanda ake daidaita saurin kwararar su cikin sauƙi.
(2) Ruwa. Wasu sinadarai masu amsawa a zafin ɗaki ko kuma ɗan ƙaramin zafin jiki, akwai matsin lamba mai yawa na tururi, kamar TiCI4, SiCl4, CH3SiCl3, da sauransu, ana iya amfani da su don ɗaukar iskar gas (kamar H2, N2, Ar) ta saman ruwan ko ruwan da ke cikin kumfa, sannan a ɗauki tururin da ya cika na sinadarin zuwa ɗakin studio.
(3) Yanayin tauri. Idan babu tushen iskar gas ko ruwa mai dacewa, ana iya amfani da kayan abinci masu ƙarfi kawai. Wasu abubuwa ko mahaɗan su a cikin ɗaruruwan digiri suna da matsin lamba mai yawa na tururi, kamar TaCl5, Nbcl5, ZrCl4, da sauransu, ana iya ɗaukar su zuwa ɗakin studio ta amfani da iskar gas mai ɗaukar kaya da aka saka a cikin layin fim ɗin.
Yanayin da aka fi sani da shi yana faruwa ne ta hanyar wani nau'in iskar gas da kuma sinadarin iskar gas-solid ko gas-liquid, wanda hakan ke haifar da sinadaran iskar gas masu dacewa zuwa ga isar da kayan aiki. Misali, iskar gas ta HCl da ƙarfe ta Ga suna amsawa ga sinadaran iskar gas ta GaCl, wadda ake jigilar ta zuwa ɗakin aiki a cikin nau'in GaCl.
– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua
Lokacin Saƙo: Nuwamba-16-2023