Ko te hangarau CVD e hangai ana ki te tauhohenga matū. Ko te tauhohenga kei roto ngā matū tauhohenga i te āhua hau, ā, kei roto tetahi o ngā hua i te āhua totoka ka kiia ko te tauhohenga CVD, nō reira me tutuki i tana pūnaha tauhohenga matū ngā tikanga e toru e whai ake nei.
(1) I te pāmahana whakatakotoranga, me tino teitei te pēhanga kohu o ngā matū tauhohe. Mena he hau katoa ngā matū tauhohe i te pāmahana rūma, he māmā noa te taputapu whakatakotoranga, ki te mea he pūngāwerewere ngā matū tauhohe i te iti rawa o te pāmahana rūma, me whakamahana kia pūngāwerewere, ā, i ētahi wā me whakamahi te hau kawe hei kawe mai ki te rūma tauhohe.
(2) Mō ngā hua o te tauhohenga, me noho ngā matū katoa i roto i te āhua hau engari ko te putunga e hiahiatia ana, arā, kei roto i te āhua totoka.
(3) Me iti te pēhanga kohu o te kiriata kua whakatakotoria kia mau ai te piri o te kiriata kua whakatakotoria ki tētahi papa he pāmahana whakatakoto motuhake i te wā o te tauhohenga whakatakoto. Me iti hoki te pēhanga kohu o te rauemi papa i te pāmahana whakatakoto.
Kua wehea ngā matū tauhohe whakatakotoranga ki ngā āhua matua e toru e whai ake nei.
(1) Āhua hau. Ko ngā rauemi pūtake he hau i te pāmahana rūma, pērā i te methane, te hauhā waro, te haukini, te chlorine, me ētahi atu, e tino pai ana mō te whakatakotoranga o te mamaoa matū, ā, he ngāwari hoki te whakahaere i te tere rere.
(2) Wai. Ko ētahi matū tauhohenga i te pāmahana rūma, i te pāmahana paku teitei ake rānei, he nui te pēhanga kohu, pērā i te TiCI4, SiCl4, CH3SiCl3, me ētahi atu, ka taea te whakamahi hei kawe i te hau (pērā i te H2, N2, Ar) kia rere mā te mata o te wai, te wai rānei i roto i te mirumiru, kātahi ka kawe i ngā kohu kua mākū o te matū ki roto i te whare taiwhanga.
(3) Āhua totoka. Mēnā kāore he pūtake hau, wai rānei e tika ana, ko ngā rauemi āhua totoka anake ka taea te whakamahi. Ko ētahi huānga, ko ō rātou matū rānei i roto i ngā rau nekehanga, he nui te pēhanga kohu, pērā i te TaCl5, Nbcl5, ZrCl4, me ētahi atu, ka taea te kawe ki roto i te whare hanga mā te whakamahi i te hau kawe kua whakatakotoria ki roto i te paparanga kiriata.
Ko te momo āhuatanga e tino kitea ana, mā te tauhohenga hau-totoka, hau-wai rānei o tētahi hau motuhake, ka puta he wāhanga hau e tika ana hei tuku ki te whare whakaata. Hei tauira, ka tauhohe te hau HCl me te konganuku Ga hei hanga i te wāhanga hau GaCl, ka haria ki te whare whakaata i te āhua o GaCl.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: Whiringa-ā-rangi 16-2023