Ubuchwepheshe bokumboza nge-CVD bunezici ezilandelayo:
1. Ukusebenza kwenqubo yemishini ye-CVD kulula futhi kuyaguquguquka, futhi ingalungiselela amafilimu ahlanganisiwe noma ahlanganisiwe namafilimu e-alloy anezilinganiso ezahlukene;
2. Ukugqoka kwe-CVD kunezindlela eziningi zokusebenzisa, futhi kungasetshenziswa ukulungiselela izinhlobo ezahlukene zokugqoka zensimbi noma zefilimu yensimbi;
3. Ukusebenza kahle kokukhiqiza ngenxa yamazinga okufakwa asukela kuma-micron ambalwa kuya kumakhulu ama-micron ngomzuzu;
4. Uma kuqhathaniswa nendlela ye-PVD, i-CVD inokusebenza okungcono kokuphambuka futhi ifaneleka kakhulu kuma-substrate okumboza anezimo eziyinkimbinkimbi, njengemifantu, imigodi embozwe, ngisho nezakhiwo zemigodi eyimpumputhe. Ingubo ingafakwa efilimini enobuncane obuhle. Ngenxa yokushisa okuphezulu ngesikhathi senqubo yokwakha ifilimu, kanye nokunamathela okuqinile esibonakalayo se-substrate yefilimu, ungqimba lwefilimu luqinile kakhulu.
5. Umonakalo obangelwa imisebe uphansi kakhulu futhi ungahlanganiswa nezinqubo zesekethe ezihlanganisiwe ze-MOS.
——Lesi sihloko sishicilelwe nguGuangdong Zhenhua,umenzi womshini wokumboza nge-vacuum
Isikhathi sokuthunyelwe: Mashi-29-2023