Tekinoroji yekuputira yeCVD ine hunhu hunotevera:
1. Mashandiro ekushandisa michina yeCVD ari nyore uye anochinjika, uye anogona kugadzira mafirimu ega kana emhando dzakasiyana uye mafirimu emhando dzakasiyana;
2. Kuputira kweCVD kune mashandisirwo akasiyana-siyana, uye kunogona kushandiswa kugadzira machira akasiyana-siyana esimbi kana simbi;
3. Kubudirira kukuru kwekugadzirwa nekuda kwehuwandu hwekuiswa kwezvinhu kubva pama micron mashoma kusvika kumazana ema micron paminiti;
4. Kana tichienzanisa nenzira yePVD, CVD ine mashandiro ari nani ekuparadzanisa uye yakakodzera zvikuru kune substrates dzekuputira dzine maumbirwo akaomarara, akadai semigero, maburi akaputirwa, uye kunyange maburi asina kuoneka. Coating yacho inogona kuputirwa mufirimu ine hupfupi hwakanaka. Nekuda kwekupisa kwakanyanya panguva yekugadzira firimu, uye kunamira kwakasimba painterface yesubstrate yefirimu, firimu rakasimba kwazvo.
5. Kukuvadzwa kunokonzerwa nemwaranzi kwakaderera uye kunogona kubatanidzwa nemaitiro eMOS integrated circuit.
——Chinyorwa ichi chakaburitswa naGuangdong Zhenhua, amugadziri wemuchina wevacuum coating
Nguva yekutumira: Kurume-29-2023