Nā ʻano o nā lako hana uhi CVD

Loaʻa i ka ʻenehana uhi CVD nā ʻano penei:

1. He maʻalahi a maʻalahi hoʻi ke kaʻina hana o nā lako CVD, a hiki iā ia ke hoʻomākaukau i nā kiʻiʻoniʻoni hoʻokahi a hui pū ʻia a me nā kiʻiʻoniʻoni me nā ʻano like ʻole;

2. Loaʻa i ka uhi CVD kahi ākea o nā noi, a hiki ke hoʻohana ʻia e hoʻomākaukau i nā ʻano uhi metala a me nā kiʻiʻoniʻoni metala like ʻole;

3. Ka pono hana kiʻekiʻe ma muli o nā helu waiho ʻana mai kekahi mau microns a i nā haneli microns i kēlā me kēia minuke;

4. Ke hoʻohālikelike ʻia me ke ʻano PVD, ʻoi aku ka maikaʻi o ka hana diffraction o CVD a kūpono loa ia no ka uhi ʻana i nā substrates me nā ʻano paʻakikī, e like me nā grooves, nā lua i uhi ʻia, a me nā ʻano puka makapō. Hiki ke hoʻopili ʻia ka uhi ʻana i loko o kahi kiʻiʻoniʻoni me ka compactness maikaʻi. Ma muli o ke kiʻekiʻe o ka mahana i ka wā o ke kaʻina hana kiʻiʻoniʻoni, a me ka hoʻopili ikaika ʻana ma ka interface substrate kiʻiʻoniʻoni, paʻa loa ka papa kiʻiʻoniʻoni.

5. He haʻahaʻa iki ka pōʻino i hana ʻia e ka radiation a hiki ke hoʻohui ʻia me nā kaʻina hana kaapuni hoʻohui ʻia ʻo MOS.

——Ua paʻi ʻia kēia ʻatikala e Guangdong Zhenhua, hemea hana mīkini uhi hakahaka