Fasahar rufe CVD tana da halaye masu zuwa:
1. Tsarin aikin kayan aikin CVD yana da sauƙi kuma mai sassauƙa, kuma yana iya shirya fina-finai ɗaya ko na haɗaka da fina-finan gami tare da girma daban-daban;
2. Rufin CVD yana da nau'ikan aikace-aikace iri-iri, kuma ana iya amfani da shi don shirya nau'ikan murfin ƙarfe ko na ƙarfe;
3. Ingantaccen aiki mai yawa saboda yawan ajiyar bayanai daga ƙananan microns zuwa ɗaruruwan microns a minti ɗaya;
4. Idan aka kwatanta da hanyar PVD, CVD yana da ingantaccen aikin diffraction kuma ya dace sosai don shafa substrates masu siffofi masu rikitarwa, kamar ramuka, ramuka masu rufi, har ma da tsarin ramukan makafi. Ana iya shafa murfin a cikin fim mai kyau. Saboda yawan zafin jiki yayin aikin samar da fim, da kuma mannewa mai ƙarfi akan hanyar haɗin fim ɗin, layin fim ɗin yana da ƙarfi sosai.
5. Lalacewar da radiation ke haifarwa ba ta da yawa kuma ana iya haɗa ta da tsarin da'irar da aka haɗa ta MOS.
——Wannan labarin Guangdong Zhenhua ce ta buga shi, waniinjin shafa injin injin
Lokacin Saƙo: Maris-29-2023