Teknụzụ mkpuchi CVD nwere njirimara ndị a:
1. Usoro ọrụ nke CVD ngwá ọrụ dịtụ mfe ma na-agbanwe agbanwe, na ọ nwere ike ịkwadebe otu fim ma ọ bụ ihe mejupụtara na ihe nkiri alloy dị iche iche;
2. Ihe mkpuchi CVD nwere ọtụtụ ngwa ngwa, a pụkwara iji ya mee ihe dị iche iche nke ihe mkpuchi ígwè ma ọ bụ ígwè;
3. Nrụpụta nrụpụta dị elu n'ihi ọnụego ntinye ego sitere na micron ole na ole ruo narị microns kwa nkeji;
4. Tụnyere PVD usoro, CVD nwere mma diffraction arụmọrụ na bụ nnọọ adabara mkpuchi substrates na mgbagwoju shapes, dị ka grooves, mkpuchi oghere, na ọbụna kpuru oghere owuwu.Enwere ike ịgbanye ihe mkpuchi ahụ n'ime ihe nkiri nke nwere nkwekọrịta dị mma.N'ihi na elu okpomọkụ n'oge film akpụ usoro, na ike adhesion na film substrate interface, ihe nkiri oyi akwa siri nnọọ ike.
5. Nbibi kpatara radieshon dị ntakịrị ma nwee ike jikọta ya na usoro sekit agbakwunyere MOS.
——Ndị na-ebipụta akụkọ a bụ Guangdong Zhenhua, aonye na-emepụta igwe mkpuchi ikuku
Oge nzipu: Mar-29-2023