Itekhnoloji yokugquma yeCVD ineempawu ezilandelayo:
1. Inkqubo yokusebenza kwezixhobo zeCVD ilula kwaye iguquguquka, kwaye ingalungiselela iifilimu ezi-single okanye ezidityanisiweyo kunye neefilimu ze-alloy ezinemilinganiselo eyahlukeneyo;
2. I-CVD coating ineendlela ezahlukeneyo zokusetyenziswa, kwaye ingasetyenziselwa ukulungiselela iintlobo ngeentlobo ze-metal okanye ze-metal film coating;
3. Ukusebenza kakuhle kwemveliso ngenxa yamazinga okufakwa kwezinto ukusuka kwii-microns ezimbalwa ukuya kumakhulu ee-microns ngomzuzu;
4. Xa kuthelekiswa nendlela ye-PVD, i-CVD inamandla okusebenza ngcono ekukhanyeni kwaye ifanelekile kakhulu kwii-substrates zokugquma ezineemilo ezintsonkothileyo, ezifana nee-grooves, imingxunya egqunyiweyo, kwanezakhiwo zemingxunya engaboniyo. I-coating ingagqunywa kwifilimu enobuncinci obuhle. Ngenxa yobushushu obuphezulu ngexesha lenkqubo yokwenza ifilimu, kunye nokunamathela okunamandla kwi-interface ye-substrate yefilimu, umaleko wefilimu uqinile kakhulu.
5. Umonakalo obangelwa yimitha uphantsi kakhulu kwaye ungadityaniswa neenkqubo zesekethe ezidityanisiweyo zeMOS.
——Eli nqaku lipapashwe nguGuangdong Zhenhua,umenzi womatshini wokugquma nge-vacuum
Ixesha lokuthumela: Matshi-29-2023