Iteknoloji yokugquma nge-vacuum yiteknoloji ebeka izinto zefilimu ebhityileyo kumphezulu wezinto ezingaphantsi komhlaba phantsi kwendawo yokugquma nge-vacuum, esetyenziswa kakhulu kwi-elektroniki, kwi-optics, ekupakisheni, ekuhombiseni nakwezinye iindawo. Izixhobo zokugquma nge-vacuum zinokwahlulwahlulwa zibe zezi ntlobo zilandelayo:
1. Izixhobo zokugquma ngobushushu: le yindlela yesiqhelo yokugquma nge-vacuum, ngokufudumeza izinto ezibhityileyo zefilimu kwisikhephe sokugquma, izinto ziyakhutshwa zibe ngumphunga zize zibekwe phezu komphezulu wezinto ezingaphantsi komhlaba.
2. Izixhobo zokugquma ezitshiza: kusetyenziswa ii-ion ezinamandla aphezulu ukubetha umphezulu wento ekujoliswe kuyo, ii-athomu zezinto ekujoliswe kuzo ziyatshiza zize zibekwe kwi-substrate material. I-Magnetron sputtering iyakwazi ukufumana ukunamathela okufanayo nokuqinileyo kwefilimu, okufanelekileyo kwimveliso enkulu.
3. Izixhobo zokubeka imiqadi ye-ion: Imiqadi ye-ion isetyenziselwa ukufaka izinto zefilimu ebhityileyo kwi-substrate. Le ndlela inokufumana iifilimu ezifanayo kwaye ifanelekile kwimicimbi eneemfuno eziphezulu zokuchaneka, kodwa ixabiso lezixhobo liphezulu.
4. Izixhobo zokususa umphunga wekhemikhali (i-CVD): Zenza iifilimu ezincinci kumphezulu wezinto ezisetyenziswa kwisiseko sezinto ngokusebenzisa i-chemical reaction. Le ndlela ingalungiselela iifilimu ezikumgangatho ophezulu, ezineentlobo ngeentlobo, kodwa izixhobo zinzima kwaye zibiza kakhulu.
5. Izixhobo zeMolecular Beam Epitaxy (MBE): Le yindlela yokulawula ukukhula kweefilimu ezincinci kwinqanaba le-athomu kwaye isetyenziselwa kakhulu ukulungiselela iileya ezincinci kakhulu kunye nezakhiwo zeeleya ezininzi zezicelo ze-semiconductor kunye ne-nanotechnology.
6. Izixhobo zePlasma Enhanced Chemical Vapour Deposition (PECVD): Le yindlela esebenzisa iplasma ukuphucula ukubekwa kweefilimu ezincinci nge-chemical reaction, okuvumela ukwakheka ngokukhawuleza kweefilimu ezincinci kumaqondo obushushu aphantsi.
7. Izixhobo zePulsed Laser Deposition (PLD): Ezi zisebenzisa iipulses zelaser ezinamandla aphezulu ukubetha ithagethi, zikhuphe izinto eziphuma kumphezulu wethagethi zize ziwubeke kwi-substrate, kwaye zifanelekile ekukhuliseni iifilimu ze-oxide ezikumgangatho ophezulu nezintsonkothileyo.
Isixhobo ngasinye kwezi sineempawu zaso kuyilo nasekusebenzeni kwaye sifanelekile kwiindlela ezahlukeneyo zokusebenza kwemizi-mveliso nakwiindawo zophando. Ngophuhliso lwetekhnoloji, itekhnoloji yokugquma nge-vacuum nayo iyaphucuka, kwaye nezixhobo ezintsha zokugquma nge-vacuum nazo ziyavela.
–Eli nqaku likhutshwe nguumatshini wokugquma nge-vacuumumenzi Guangdong Zhenhua
Ixesha lokuthumela: Juni-12-2024