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What are the classifications of vacuum coating equipment?

Article source:Zhenhua vacuum

Vacuum coating technology is a technology that deposits thin film materials onto the surface of substrate materials under vacuum environment, which is widely used in electronics, optics, packaging, decoration and other fields. Vacuum coating equipment can be mainly divided into the following types:

1. Thermal evaporation coating equipment: this is the most traditional vacuum coating method, by heating the thin film material in the evaporation boat, the material is evaporated and deposited onto the surface of the substrate material.
2. Sputtering coating equipment: using high-energy ions to hit the surface of the target material, the target material atoms are sputtered and deposited to the substrate material. Magnetron sputtering is able to obtain more uniform and stronger adhesion of the film, suitable for mass production.
3.Ion beam deposition equipment: Ion beams are used to deposit thin film materials onto the substrate. This method can obtain very uniform films and is suitable for occasions with high precision requirements, but the equipment cost is high.
4. Chemical Vapour Deposition (CVD) Equipment: Forms thin films on the surface of the substrate material through a chemical reaction. This method can prepare high-quality, multi-species films, but the equipment is complex and costly.
5. Molecular Beam Epitaxy (MBE) equipment: This is a method of controlling the growth of thin films at the atomic level and is mainly used for the preparation of ultra-thin layers and multilayer structures for semiconductor and nanotechnology applications.
6. Plasma Enhanced Chemical Vapour Deposition (PECVD) equipment: This is a technique that uses plasma to enhance the deposition of thin films by a chemical reaction, allowing for the rapid formation of thin films at lower temperatures.
7. Pulsed Laser Deposition (PLD) devices: These use high-energy laser pulses to strike a target, evaporate material from the target surface and deposit it onto a substrate, and are suitable for growing high-quality, complex oxide films.
Each of these devices has its own characteristics in design and operation and is suitable for different industrial applications and research areas. With the development of technology, vacuum coating technology is also advancing, and new vacuum coating equipment is also emerging.

 –This article is released by vacuum coating machine manufacturer Guangdong Zhenhua

Post time: Jun-12-2024