Tekinoroji yekuputira vacuum itekinoroji inoisa zvinhu zvakatetepa pamusoro pezvinhu zve substrate pasi penzvimbo ye vacuum, iyo inoshandiswa zvakanyanya mumagetsi, optics, kurongedza, kushongedza nedzimwe nzvimbo. Midziyo yekuputira vacuum inogona kupatsanurwa zvakanyanya mumhando dzinotevera:
1. Midziyo yekuputira nekupisa: iyi ndiyo nzira yechinyakare yekuputira nekupisa firimu diki muchikepe chekuputira nekupisa, jira racho rinopwanyika roiswa pamusoro pechinhu chiri pasi pevhu.
2. Midziyo yekuputira simbi: ichishandisa maayoni ane simba rakawanda kurova pamusoro pechinhu chaunoda, maatomu esimbi anoputirwa oiswa muchinhu chaunoda. Magnetron simbi inoputira simbi inokwanisa kuwana kubatana kwakafanana uye kwakasimba kwefirimu, zvakakodzera kugadzirwa kwakawanda.
3. Midziyo yekuisa danda reIon: Matanda eIon anoshandiswa kuisa zvinhu zvakatetepa zvefirimu pamusoro pevhu. Nzira iyi inogona kuwana mafirimu akafanana uye yakakodzera zviitiko zvine zvinodiwa nemazvo, asi mutengo wemidziyo wakakwira.
4. Midziyo yeChemical Vapour Deposition (CVD): Inogadzira mafirimu matete pamusoro pechinhu chiri pasi pevhu kuburikidza nemakemikari. Nzira iyi inogona kugadzira mafirimu emhando yepamusoro, emhando dzakasiyana-siyana, asi michina yacho yakaoma uye inodhura.
5. Midziyo yeMolecular Beam Epitaxy (MBE): Iyi inzira yekudzora kukura kwemafirimu matete padanho reatomu uye inonyanya kushandiswa pakugadzirira ma layers matete uye multilayer structures ekushandisa semiconductor uye nanotechnology.
6. Midziyo yePlasma Enhanced Chemical Vapour Deposition (PECVD): Iyi inzira inoshandisa plasma kuwedzera kuiswa kwemafirimu matete nemakemikari, zvichibvumira kuumbwa kwemafirimu matete nekukurumidza patembiricha yakaderera.
7. Midziyo yePulsed Laser Deposition (PLD): Izvi zvinoshandisa mapulse elaser ane simba guru kuti zvirove chinangwa, zvobvisa zvinhu kubva pamusoro pechinhu chacho zvozviisa pachigadziko, uye zvakakodzera kurima mafirimu emhando yepamusoro, akaomarara eoxide.
Imwe neimwe yemidziyo iyi ine hunhu hwayo mukugadzirwa uye mashandiro ayo uye yakakodzera kushandiswa kwakasiyana-siyana mumaindasitiri nenzvimbo dzekutsvagisa. Nekuvandudzwa kwetekinoroji, tekinoroji yekuputira vacuum iri kufambira mberiwo, uye michina mitsva yekuputira vacuum iri kubudawo.
–Chinyorwa ichi chakaburitswa namuchina wevacuum unhanimugadziri Guangdong Zhenhua
Nguva yekutumira: Chikumi-12-2024