Ukadaulo wopaka utoto wa vacuum ndi ukadaulo womwe umayika zinthu zopyapyala pamwamba pa zinthu zapansi pa nthaka pansi pa vacuum, zomwe zimagwiritsidwa ntchito kwambiri pa zamagetsi, ma optics, ma CD, zokongoletsera ndi zina. Zipangizo zopaka utoto wa vacuum zitha kugawidwa m'magulu otsatirawa:
1. Zipangizo zophikira zotenthetsera mpweya: iyi ndi njira yachikhalidwe kwambiri yophikira vacuum, potenthetsa filimu yopyapyala m'boti lotenthetsera mpweya, zinthuzo zimasanduka nthunzi ndikuyikidwa pamwamba pa zinthuzo.
2. Zipangizo zophikira zothira: pogwiritsa ntchito ma ayoni amphamvu kwambiri kuti agunde pamwamba pa chinthu chomwe chikufunidwa, maatomu a chinthucho amathira ndikuyikidwa ku chinthucho. Magnetron sputtering imatha kupeza kumatirira kofanana komanso kwamphamvu kwa filimuyo, koyenera kupanga zinthu zambiri.
3. Zipangizo zoyikapo nyali za ma ion: Nyali za ma ion zimagwiritsidwa ntchito kuyika zinthu zopyapyala za filimu pa substrate. Njirayi imatha kupeza mafilimu ofanana kwambiri ndipo ndi yoyenera pazochitika zomwe zimafunikira kulondola kwambiri, koma mtengo wa zida ndi wokwera.
4. Zipangizo Zochotsera Nthunzi ya Mankhwala (CVD): Zimapanga mafilimu opyapyala pamwamba pa zinthu zapansi panthaka pogwiritsa ntchito mankhwala. Njirayi imatha kukonza mafilimu apamwamba, amitundu yambiri, koma zida zake ndi zovuta komanso zokwera mtengo.
5. Zipangizo za Molecular Beam Epitaxy (MBE): Iyi ndi njira yowongolera kukula kwa mafilimu owonda pamlingo wa atomiki ndipo imagwiritsidwa ntchito makamaka pokonzekera zigawo zoonda kwambiri komanso zomangamanga zamitundu yambiri za ntchito za semiconductor ndi nanotechnology.
6. Zipangizo Zopangira Mpweya Wowonjezera Madzi a Plasma (PECVD): Iyi ndi njira yomwe imagwiritsa ntchito plasma kuti iwonjezere kuyika kwa mafilimu owonda ndi mankhwala, zomwe zimathandiza kuti mafilimu owonda apangidwe mofulumira pa kutentha kochepa.
7. Zipangizo Zotulutsa Ma Laser Opunduka (PLD): Izi zimagwiritsa ntchito ma laser amphamvu kwambiri kuti zigwire chandamale, zimatulutsa nthunzi kuchokera pamwamba pa chandamale ndikuziyika pa substrate, ndipo ndizoyenera kubzala mafilimu apamwamba komanso ovuta a oxide.
Chida chilichonse chili ndi mawonekedwe akeake pakupanga ndi kugwiritsa ntchito ndipo chimagwiritsidwa ntchito m'mafakitale osiyanasiyana komanso m'magawo ofufuza. Chifukwa cha chitukuko cha ukadaulo, ukadaulo wopaka utoto wa vacuum ukupitilira patsogolo, ndipo zida zatsopano zopaka utoto wa vacuum zikutulukanso.
– Nkhaniyi yatulutsidwa ndimakina ophikira osakanizawopanga Guangdong Zhenhua
Nthawi yotumizira: Juni-12-2024
