Ikoranabuhanga ryo gusiga irangi ry'ibikoresho biva mu cyuma ni ikoranabuhanga rishyira ibikoresho bito ku buso bw'ibikoresho biri munsi y'ubutaka, rikoreshwa cyane mu bikoresho by'ikoranabuhanga, ibijyanye n'ikoranabuhanga, gupakira, imitako n'ibindi. Ibikoresho byo gusiga irangi ry'ibikoresho bishobora kugabanywamo ubwoko bukurikira:
1. Ibikoresho byo gusiga imvange y'ubushyuhe: ubu ni bwo buryo busanzwe bwo gusiga imvange y'ubushyuhe, mu gushyushya ibikoresho bito mu bwato bukoresha imvange y'ubushyuhe, ibikoresho bihinduka umwuka bigashyirwa ku buso bw'ibikoresho bya substrate.
2. Ibikoresho byo gusiga irangi: hakoreshejwe iyoni zikoresha ingufu nyinshi kugira ngo zigere ku buso bw'ikintu kigenewe, atome z'ikintu kigenewe zijugunywa zigashyirwa ku kintu kiri mu butaka. Magnetron sputtering ishobora kubona filime ifatanye neza kandi ikomeye, ikwiriye gukorwa ku bwinshi.
3. Ibikoresho byo gushyiramo imirasire ya Ion: Imirasire ya Ion ikoreshwa mu gushyira ibikoresho bya firime nto ku butaka. Ubu buryo bushobora kubona firime zimwe kandi bukwiriye ibihe bifite ibisabwa bihanitse, ariko igiciro cy'ibikoresho ni kinini.
4. Ibikoresho byo Gukuraho Umwotsi w'Imyuka (CVD): Bikora uduce duto ku buso bw'ibikoresho bya substrate binyuze mu buryo bwa shimi. Ubu buryo bushobora gutegura uduce twiza kandi tw'ubwoko bwinshi, ariko ibikoresho biragoye kandi birahenze.
5. Ibikoresho bya Molecular Beam Epitaxy (MBE): Ubu ni uburyo bwo kugenzura ikura rya filime nto ku rwego rwa atome kandi bukoreshwa cyane cyane mu gutegura imiterere y’ibice bito cyane n’imiterere y’ibice byinshi mu bikorwa bya semiconductor na nanotechnology.
6. Ibikoresho byo Gukuraho Umwotsi Uva mu Giti Gikoresha Plasma (PECVD): Ubu ni uburyo bukoresha plasma kugira ngo yongere uburyo filime nto zishyirwamo hakoreshejwe uburyo bwa chemical reaction, bigatuma filime nto zikorwa vuba ku bushyuhe buri hasi.
7. Ibikoresho byo Gukuraho Ingufu za Laser (PLD): Ibi bikoresha imirasire ya laser ifite ingufu nyinshi kugira ngo bikubite ku kintu runaka, bihindure ibintu biva ku kintu runaka hanyuma bigishyire ku kintu runaka, kandi birakwiriye mu guhinga filime za oxide nziza kandi zigoye.
Buri gikoresho muri ibi gifite imiterere yacyo mu miterere no mu mikorere yacyo, kandi gikwiriye gukoreshwa mu nganda zitandukanye no mu nzego z’ubushakashatsi. Uko ikoranabuhanga rigenda ritera imbere, ikoranabuhanga ryo gusiga irangi ry’ibikoresho bivamo umwuka naryo riri gutera imbere, kandi ibikoresho bishya byo gusiga irangi ry’ibikoresho bivamo umwuka birimo kugaragara.
–Iyi nkuru yasohotse naimashini ikoresha icyuma gikingira umwukauruganda Guangdong Zhenhua
Igihe cyo kohereza: Kamena-12-2024
