Ko te hangarau paninga korehau he hangarau e whakatakoto ana i ngā rauemi kiriata angiangi ki runga i te mata o ngā rauemi papa i raro i te taiao korehau, e whakamahia whānuitia ana i roto i ngā mahi hiko, whatu, takai, whakapaipai me ētahi atu mara. Ka taea te wehewehe i ngā taputapu paninga korehau ki ēnei momo:
1. Taputapu paninga mimiti wera: koinei te tikanga paninga mimiti tuku iho, mā te whakamahana i te rauemi kiriata angiangi i roto i te poti mimiti, ka mimiti te rauemi ka whakatakotoria ki runga i te mata o te rauemi papa.
2. Ngā taputapu paninga pupuhi: mā te whakamahi i ngā katote pūngao-teitei hei patu i te mata o te rauemi ūnga, ka pupuhihia ngā ngota rauemi ūnga ka whakatakotoria ki te rauemi papa. Ka taea e te pupuhi Magnetron te whiwhi i te piri ōrite me te kaha ake o te kiriata, he pai mō te hanga papatipu.
3. Taputapu whakatakotoranga hihi katote: Ka whakamahia ngā hihi katote hei whakatakotoranga i ngā rauemi kiriata angiangi ki runga i te papa. Ka taea e tēnei tikanga te whakaputa kiriata tino ōrite, ā, he pai mō ngā wā e hiahiatia ana he tino tika, engari he nui te utu o ngā taputapu.
4. Taputapu Whakatakotoranga Kohu Matū (CVD): Ka hanga i ngā kiriata angiangi ki te mata o te rauemi papa mā te tauhohenga matū. Ka taea e tēnei tikanga te whakarite i ngā kiriata kounga teitei, maha-momo, engari he uaua, he utu nui hoki ngā taputapu.
5. Ngā taputapu Epitaxy Kurupae Molecular (MBE): He tikanga tēnei mō te whakahaere i te tipu o ngā kiriata angiangi i te taumata atomika, ā, e whakamahia ana mō te whakarite i ngā paparanga tino angiangi me ngā hanganga paparanga maha mō ngā tono semiconductor me te nanotechnology.
6. Ngā taputapu Whakapūtanga Matū Whakarei i te Plasma (PECVD): He tikanga tēnei e whakamahi ana i te plasma hei whakarei ake i te whakapūtanga o ngā kiriata angiangi mā te tauhohenga matū, e āhei ai te hanganga tere o ngā kiriata angiangi i ngā pāmahana iti iho.
7. Ngā taputapu Whakatakotoranga Taiaho Pūhiko (PLD): Ka whakamahia e ēnei ngā pūhiko taiaho pūngao-nui hei patu i tētahi ūnga, hei mimiti i te rauemi mai i te mata o te ūnga, hei whakatakoto ki runga i tētahi papa, ā, he pai hoki mō te whakatipu i ngā kiriata waikura kounga teitei, matatini.
He āhuatanga motuhake tō ia o ēnei taputapu i roto i te hoahoa me te whakahaere, ā, he pai mō ngā tono ahumahi me ngā wāhanga rangahau rerekē. I te whanaketanga o te hangarau, kei te ahu whakamua hoki te hangarau paninga korehau, ā, kei te puta mai hoki ngā taputapu paninga korehau hou.
–Nā temīhini paninga korehaukaihanga Guangdong Zhenhua
Wā tuku: Pipiri-12-2024