Iimpawu mechanical umaleko inwebu zichatshazelwa adhesion, uxinzelelo, ingxinano aggregation, njl Ukususela kubudlelwane phakathi inwebu umaleko izinto kunye nenkqubo izinto, kunokubonwa ukuba sifuna ukuphucula amandla mechanical umaleko inwebu, kufuneka sigxininise kule parameters inkqubo elandelayo:
(1) umgangatho wevacuum. I-vacuum ekusebenzeni kwefilimu ibonakala kakhulu. Uninzi lwezalathisi zokusebenza zomaleko wefilimu zixhomekeke kakhulu kwinqanaba le-vacuum. Ngokuqhelekileyo, njengoko iqondo le-vacuum likhula, ukuxinana kwefilimu kuyanda, ukuqina kuyanda, isakhiwo sefilimu siphuculwe, ukubunjwa kweekhemikhali kuba nyulu, kodwa kwangaxeshanye uxinzelelo luyanda.
(2) Izinga lokubekwa. Ukuphucula izinga lokubeka nje kuphela ingasetyenziselwa ukuphucula izinga lokumka komphunga, oko kukuthi, ukwandisa iqondo lobushushu lomthombo wokuphuphuma, lingasetyenziselwa ukwandisa indlela yomthombo womphunga wokuphuphumayo ukuze kuphunyezwe, kodwa ukusetyenziswa komthombo womphunga wokunyusa ubushushu bendlela inemiqobo yayo: yenza uxinezeleko lwenwebu yenwebu lukhulu kakhulu; Igesi eyenza ifilim kulula ukubola. Ngoko ngamanye amaxesha ukunyusa indawo yomthombo womphuphu kunokuphucula iqondo lobushushu lemvelaphi yokuphuphuma lilungile.
(3) ubushushu be-substrate. Ukwandisa ubushushu be-substrate kukulungele ukubhengezwa kwi-substrate ebusweni be-athomu yegesi eseleyo ukuba ingabandakanyi, ukwandisa i-substrate kunye namandla okubopha phakathi kweealekyuli ezigciniweyo: ngexesha elifanayo liya kukhuthaza ukuguqulwa kwe-adsorption yomzimba kwi-adsorption yekhemikhali, ukuphucula intsebenziswano phakathi kweemolekyuli, ukwenzela ukuba isakhiwo se-membrane siqinise. Ngokomzekelo, i-Mg, inwebu, ukufudumeza kwe-substrate ukuya kwi-250 ~ 300 ℃ inokunciphisa uxinzelelo lwangaphakathi, iphucule ukuxinana kwe-aggregation, ikhulise ubulukhuni be-membrane umaleko: ukufudumeza kwe-substrate ukuya kwi-120 ~ 150 ℃ elungiselelwe i-Zr03-Si02, i-membrane ye-multilayer, amandla ayo omatshini anyuke kakhulu, kodwa i-substrate ye-membrane ibangela ubushushu obuphezulu.
(4) Ibhombu ye-ion. I-bombardment ye-ion inefuthe ekwenziweni kwemiphezulu ebambene kakhulu, uburhabaxa bomphezulu, i-oxidation kunye noxinaniso oludityanisiweyo. I-bombardment ngaphambi kokugubungela kunokucoca umphezulu kunye nokwandisa ukunamathela; ibhomba emva kokugquma kunokuphucula ukuxinana komgangatho wefilimu, njl., ngaloo ndlela ukwandisa amandla omatshini kunye nobunzima.
(5) Ukucoca i-substrate. Indlela yokucoca i-Substrate ayifanelekanga okanye ayihlambulukanga, kwi-substrate ukungcola okushiyekileyo okanye i-arhente yokucoca, emva koko kubangele ukungcola okutsha, ekugqumeni kweemeko ezahlukeneyo zokubambisana kunye nokunamathela, okuchaphazela umgangatho wokuqala weempawu zesakhiwo kunye nobukhulu be-optical, kodwa kwakhona wenze umaleko wefilimu kulula ukuvela kwi-substrate, ngaloo ndlela uguqula iimpawu zomaleko wefilimu.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: May-04-2024