Theknoloji ea ho roala ka vacuum ke theknoloji e behang lisebelisoa tse tšesaane tsa filimi holim'a lisebelisoa tsa substrate tlas'a tikoloho ea vacuum, e sebelisoang haholo ho lisebelisoa tsa elektroniki, optics, ho paka, ho khabisa le likarolo tse ling. Lisebelisoa tsa ho roala vacuum li ka aroloa haholo ka mefuta e latelang:
1. Thepa ea ho roala mouoane oa mocheso: ona ke mokhoa o tloaelehileng ka ho fetisisa oa ho roala vacuum, ka ho futhumatsa lintho tse tšesaane tsa filimi ka har'a sekepe sa mouoane, thepa e fetoha mouoane ebe e kenngoa holim'a thepa ea substrate.
2. Lisebelisoa tsa ho roala: ho sebelisa li-ion tse nang le matla a phahameng ho otla holim'a thepa e lebisitsoeng, liathomo tsa thepa tse lebisitsoeng li phunyeletsoa ebe li kenngoa ho thepa ea substrate. Magnetron sputtering e khona ho fumana sekhomaretsi se matla le se matla sa filimi, se loketseng tlhahiso ea bongata.
Thepa ea 3.Ion beam deposition: Maballo a Ion a sebelisetsoa ho kenya lisebelisoa tse tšesaane tsa filimi holim'a substrate. Mokhoa ona o ka fumana lifilimi tse ts'oanang haholo 'me o loketse liketsahalo tse nang le litlhoko tse nepahetseng haholo, empa theko ea thepa e holimo.
4. Lisebelisoa tsa Lik'hemik'hale Tsa Vapor (CVD): E etsa lifilimi tse tšesaane holim'a thepa ea substrate ka lik'hemik'hale tsa lik'hemik'hale. Mokhoa ona o ka lokisetsa lifilimi tsa boleng bo holimo, tse nang le mefuta e mengata, empa thepa e rarahane ebile e theko e boima.
5. Thepa ea Molecular Beam Epitaxy (MBE): Ena ke mokhoa oa ho laola khōlo ea lifilimi tse tšesaane boemong ba athomo 'me e sebelisoa haholo-holo bakeng sa ho lokisoa ha likarolo tse nyenyane haholo le mekhoa ea li-multilayer bakeng sa lisebelisoa tsa semiconductor le nanotechnology.
6. Lisebelisoa tsa Plasma Enhanced Chemical Vapor Deposition (PECVD): Ena ke mokhoa o sebelisang plasma ho ntlafatsa ho kenngoa ha lifilimi tse tšesaane ka lik'hemik'hale tsa lik'hemik'hale, tse lumellang hore ho thehoe ka potlako lifilimi tse tšesaane ka mocheso o tlaase.
7. Lisebelisoa tsa Pulsed Laser Deposition (PLD): Tsena li sebelisa li-laser tse nang le matla a phahameng a matla ho otla sepheo, lisebelisoa tse fetohang mouoane ho tloha sebakeng se lebisitsoeng le ho li beha holim'a substrate, 'me li loketse ho hōlisa lifilimi tsa oxide tsa boleng bo phahameng, tse rarahaneng.
E 'ngoe le e' ngoe ea lisebelisoa tsena e na le litšobotsi tsa eona moralong le ts'ebetsong mme e loketse lits'ebetso tse fapaneng tsa indasteri le libaka tsa lipatlisiso. Ka nts'etsopele ea mahlale a morao-rao, theknoloji ea "vacuum coating" le eona e ntse e tsoela pele, 'me lisebelisoa tse ncha tsa ho roala ka vacuum le tsona lia hlaha.
-Sengoliloeng sena se lokolloa kemochine oa ho roala ka vacuummoetsi Guangdong Zhenhua
Nako ea poso: Jun-12-2024