Maitiro Nzira dzeKuvandudza Iyo Mechanical Simba reFirimu Layer

Iyo mechanical properties ye membrane layer inobatwa nekunamatira, kushushikana, kuunganidza density, etc. Kubva pahukama huri pakati pe membrane layer zvinhu uye maitiro ekugadzirisa zvinhu, zvinogona kuonekwa kuti kana tichida kuvandudza simba remagetsi re membrane layer, tinofanira kutarisa pane zvinotevera maitiro parameters:

(1) vacuum level. Vacuum pamusoro pekuita kwefirimu iri pachena. Zvizhinji zvezviratidziro zveiyo firimu layer inotsamira zvakanyanya pane vacuum level. Kazhinji, sezvo dhigirii yevacuum inowedzera, iyo firimu aggregation density inowedzera, kusimba kunowedzera, chimiro chefirimu chinovandudzwa, chimiro chemakemikari chinova chakachena, asi panguva imwechete kushungurudzika kunowedzerawo.

(2) Deposition rate. Kuvandudza deposition rate kwete chete inogona kushandiswa kuvandudza evaporation rate, kureva, kuwedzera evaporation source tembiricha nzira, inogona zvakare kushandiswa kuwedzera evaporation source nzvimbo nzira yekuwana, asi kushandiswa kweiyo evaporation sosi kuwedzera tembiricha yenzira ine zvipingamupinyi zvayo: ita kuti membrane layer stress iwedzere; firimu-kugadzira gasi iri nyore kuora. Saka dzimwe nguva wedzera evaporation sosi nzvimbo pane kuvandudza evaporation sosi tembiricha zviri nani.

(3) substrate tembiricha. Kuwedzera kutonhora kwe substrate kunobatsira kune adsorption pane substrate pamusoro peasara gasi mamorekuru kuti asabatanidze, kuwedzera substrate uye inosunga simba pakati pemamorekuru akaiswa: panguva imwechete inosimudzira kutendeuka kwemuviri adsorption kune kemikari adsorption, kusimudzira kupindirana pakati pemamorekuru, kuitira kuti membrane layer inomira. Semuenzaniso, Mg, membrane, substrate kupisa kusvika 250 ~ 300 ℃ inogona kuderedza kushushikana kwemukati, kuvandudza aggregation density, kuwedzera kuoma kwe membrane layer: substrate kupisa kusvika 120 ~ 150 ℃ yakagadzirwa Zr03-Si02, multilayer membrane, simba rayo remagetsi rinowedzera zvakanyanya, asi iyo substrate tembiricha inokonzeresa zvakanyanya.

(4) Kubhomba kweion. Ion bombardment ine mhedzisiro pakuumbwa kwenzvimbo dzakabatana zvakanyanya, kushata kwepamusoro, oxidation uye aggregation density. Iyo bombardment isati yapfeka inogona kuchenesa pamusoro uye kuwedzera kunamatira; iyo bombardment mushure mekuputira inogona kuvandudza iyo firimu layer aggregation density, nezvimwewo, zvichiwedzera iyo mechanic simba uye kuoma.

(5) Substrate kuchenesa. Substrate yekuchenesa nzira haina kufanira kana isina kuchena, mune substrate yakasara tsvina kana yekuchenesa mumiriri, zvino ikonzeresa kusvibiswa kutsva, mukuputira kwemamiriro akasiyana ekubatana uye kunamatira, kunokanganisa yekutanga nhurikidzwa yezvimiro uye ukobvu hwemaziso, asi zvakare ita kuti iyo firimu layer iri nyore kubuda kubva kune substrate, nokudaro kushandura maitiro eiyo firimu layer.

-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua