Tekinoroji ya Vacuum ni tekinoroji ishyira ibikoresho bya firime yoroheje hejuru yibikoresho bya substrate munsi y’ibidukikije, bikoreshwa cyane muri elegitoroniki, optique, gupakira, gushushanya nizindi nzego. Ibikoresho byo gutwika Vacuum birashobora kugabanywa muburyo bukurikira:
1.
. Imashini ya Magnetron irashobora kubona uburyo bumwe kandi bukomeye bwo gufatira hamwe firime, ibereye kubyara umusaruro.
3.Ibikoresho byo kubika ibiti: ibiti bya Ion bikoreshwa mukubika ibikoresho bya firime yoroheje kuri substrate. Ubu buryo bushobora kubona firime imwe kandi irakwiriye mugihe gikenewe cyane, ariko igiciro cyibikoresho ni kinini.
4. Ubu buryo bushobora gutegura amafilime yo mu rwego rwo hejuru, amoko menshi, ariko ibikoresho biragoye kandi bihenze.
5. Ibikoresho bya Molecular Beam Epitaxy (MBE): Ubu ni uburyo bwo kugenzura imikurire ya firime yoroheje kurwego rwa atome kandi ikoreshwa cyane cyane mugutegura ibice bya ultra-thin layer hamwe nuburyo bwinshi bwo gukoresha semiconductor na nanotehnologiya.
6. Ibikoresho bya Plasma Byongerewe Imiti Yangiza (PECVD): Ubu ni tekinike ikoresha plasma kugirango iteze imbere ama firime yoroheje hifashishijwe imiti, ituma habaho kwihuta kwama firime yoroheje mubushyuhe buke.
7.
Buri kimwe muri ibyo bikoresho gifite umwihariko wacyo mugushushanya no gukora kandi birakwiriye mubikorwa bitandukanye byinganda hamwe nubushakashatsi. Hamwe niterambere ryikoranabuhanga, tekinoroji ya vacuum nayo iratera imbere, kandi ibikoresho bishya byo gutwika vacuum nabyo biragaragara.
–Iyi ngingo yasohowe naimashini itwikiriyeuruganda Guangdong Zhenhua
Igihe cyo kohereza: Jun-12-2024
