Ibiranga tekiniki by'ibikoresho byo gusiga irangi bya vacuum magnetron

Gukoresha icyuma gishyushya amashanyarazi gikoresha amashanyarazi (vacuum magnetron sputtering) birakwiriye cyane cyane ku bikoresho bifasha mu gutwikira ibintu. Mu by’ukuri, ubu buryo bushobora gushyiramo uduce duto tw’ibikoresho byose bya okiside, karubide, na nitride. Byongeye kandi, ubu buryo bukwiriye cyane cyane mu gushyiramo imiterere ya filime nyinshi, harimo imiterere y’amatara, filime z’amabara, irangi ridashobora kwangirika, nano-laminate, irangi rya superlattice, filime zirinda ubushyuhe, nibindi. Mu ntangiriro za 1970, ingero zo gushyiramo filime nziza cyane zakozwe ku bikoresho bitandukanye bya filime z’amatara. Ibi bikoresho birimo ibikoresho bitanga urumuri, semiconductors, polymers, okiside, karubide, na nitride, mu gihe fluoride ikoreshwa mu bikorwa nko gutwikira ibintu biva mu kirere.

Akamaro nyamukuru k'uburyo bwo gusukamo magnetron ni ugukoresha uburyo bwo gusigamo ibintu bishya cyangwa bidafite ingaruka kugira ngo hashyirwemo ibice by'ibi bikoresho no kugenzura imiterere y'ibice, ubugari bwa filime, ingano y'ubugari bwa filime hamwe n'imiterere ya mashini y'ibice. Ubu buryo bufite imiterere ikurikira.

1. Igipimo kinini cyo gushyiramo umwuka. Bitewe no gukoresha electrode za magnetron zihuta cyane, hashobora kuboneka urujya n'uruza rwinshi rwa iyoni, bityo bikanoza neza igipimo cyo gushyiramo umwuka n'igipimo cyo gutwikira. Ugereranyije n'izindi nzira zo gutwikiramo umwuka, gukoresha magnetron bifite ubushobozi bwinshi n'umusaruro mwinshi, kandi bikoreshwa cyane mu nganda zitandukanye.

2. Ingufu zikoreshwa cyane. Intego yo gusohora ingufu za Magnetron muri rusange ihitamo voltage iri hagati ya 200V na 1000V, akenshi ni 600V, kuko voltage ya 600V iri mu rugero rwo hejuru rw'ingufu zikoreshwa neza.

3. Ingufu nke zo gusohora amazi. Umuvuduko wa magnetron uba muto, kandi imbaraga za rukuruzi zigafunga plasma hafi ya cathode, ibyo bigatuma uduce twinshi dufite ingufu nyinshi tudatera kuri substrate.

4. Ubushyuhe buri hasi bwa substrate. Anode ishobora gukoreshwa mu kuyobora electron zikorwa mu gihe cyo gusohora, nta mpamvu yo gushyigikira substrate kugira ngo yuzuze, ibi bishobora kugabanya neza uburyo electron zitera muri substrate. Bityo ubushyuhe bwa substrate buba buri hasi, ibi bikaba ari byiza cyane kuri substrate zimwe na zimwe za pulasitiki zidahangana cyane n'ubushyuhe bwinshi.

5, Gucukura ubuso bw'intego ya Magnetron mu gucukura ntabwo ari bimwe. Gucukura ubuso bw'intego ya Magnetron mu gucukura ibintu bingana guterwa n'imbaraga za rukuruzi zitangana z'intego. Aho intego iherereye ni hanini, ku buryo igipimo cyo gukoresha neza intego ari gito (igipimo cyo gukoresha 20-30% gusa). Kubwibyo, kugira ngo hongerwe uburyo bwo gukoresha intego, ikwirakwizwa ry'intego rigomba guhinduka hakoreshejwe uburyo runaka, cyangwa ikoreshwa rya rukuruzi zigenda muri cathode naryo rishobora kunoza uburyo ikoreshwa ry'intego ringana.

6. Intego y'ibice. Ishobora gukora filime y'ibice ikoze mu buryo bwa "composite target coating alloy". Kuri ubu, uburyo bwo gukoresha "composite magnetron target sputtering" bwamaze gusigwa neza kuri Ta-Ti alloy, (Tb-Dy)-Fe na Gb-Co alloy film. Imiterere y'ibice ikoze mu buryo bwa "composite" ifite amoko ane, uko bikurikirana, ni "round inlaid target", "square inlaid target", "small square inlaid target" n' "sector inlaid target". Imikoreshereze y'imiterere y'ibice ikoze mu buryo bwa "sector inlaid" ni myiza kurushaho.

7. Uburyo bwinshi bwo gukoresha. Uburyo bwo gukurura amashanyarazi bwa Magnetron bushobora gushyiramo ibintu byinshi, ibisanzwe ni: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti, Zr, SiO, AlO, GaAs, U, W, SnO, nibindi.

Gukoresha Magnetron sputtering ni imwe mu nzira zikoreshwa cyane zo gusiga kugira ngo haboneke filime nziza. Hamwe na cathode nshya, ifite uburyo bwo gukoresha igikoresho kinini kandi ifite ubushobozi bwo gushyiramo ibintu byinshi. Guangdong Zhenhua Technology vacuum magnetron sputtering process ubu ikoreshwa cyane mu gusiga ibintu binini. Iyi nzira ntabwo ikoreshwa gusa mu gushyiramo filime y’urwego rumwe, ahubwo ikoreshwa no mu gusigamo filime y’urwego rwinshi, byongeye kandi, ikoreshwa mu gusigamo filime yo gupakira, filime y’urumuri, lamination n’izindi filime zo gusigamo.