Mbali zaukadaulo za zida zokutira zopaka vacuum magnetron

Kupopera kwa vacuum magnetron ndikofunikira kwambiri pa zophimba zoteteza. Ndipotu, njirayi imatha kuyika mafilimu opyapyala a zinthu zilizonse za oxide, carbide, ndi nitride. Kuphatikiza apo, njirayi ndi yoyeneranso kwambiri pakuyika mapangidwe a mafilimu ambiri, kuphatikiza mapangidwe a kuwala, mafilimu amitundu, zophimba zosatha, nano-laminates, zophimba za superlattice, mafilimu oteteza kutentha, ndi zina zotero. Kale mu 1970, zitsanzo zapamwamba kwambiri za zophimba mafilimu a kuwala zapangidwa pazipangizo zosiyanasiyana za zophimba mafilimu a kuwala. Zipangizozi zikuphatikizapo zipangizo zowongolera zowonekera, ma semiconductor, ma polima, ma oxide, ma carbide, ndi ma nitride, pomwe ma fluoride amagwiritsidwa ntchito pazinthu monga zophimba zotuluka mumlengalenga.

Ubwino waukulu wa njira yothira maginito pogwiritsa ntchito njira zothira maginito pogwiritsa ntchito njira zothira maginito kapena zosathira maginito kuti zikhazikitse zigawo za zinthuzi ndikuwongolera bwino kapangidwe ka zigawo, makulidwe a filimu, kufanana kwa makulidwe a filimu ndi mphamvu za makina a zigawozo. Njirayi ili ndi makhalidwe awa.

1、Chiwerengero chachikulu cha kuyika kwa ma ion. Chifukwa cha kugwiritsa ntchito ma electrode a magnetron othamanga kwambiri, kuyenda kwa ma ion ambiri kumatha kupezeka, zomwe zimapangitsa kuti kuchuluka kwa kuyika kwa ma ion kukhale bwino komanso kuchuluka kwa kuyika kwa ma sputtering kwa njira iyi yopaka. Poyerekeza ndi njira zina zopaka ma sputtering, kuyika ma magnetron kuli ndi mphamvu zambiri komanso zokolola zambiri, ndipo kumagwiritsidwa ntchito kwambiri popanga mafakitale osiyanasiyana.

2、Kugwiritsa ntchito mphamvu zambiri. Magnetron sputtering target nthawi zambiri amasankha voteji mkati mwa 200V-1000V, nthawi zambiri ndi 600V, chifukwa voteji ya 600V ili mkati mwa mphamvu zambiri zogwira ntchito bwino.

3. Mphamvu yochepa yotulutsa madzi. Mphamvu yamagetsi ya magnetron imagwiritsidwa ntchito pang'ono, ndipo mphamvu ya maginito imatseka plasma pafupi ndi cathode, zomwe zimaletsa tinthu tambirimbiri tokhala ndi mphamvu zambiri kuti tisatuluke pa substrate.

4、Kutentha kochepa kwa substrate. Anode ingagwiritsidwe ntchito kutsogolera ma elekitironi opangidwa panthawi yotulutsa, palibe chifukwa chothandizira substrate kuti imalizidwe, zomwe zingathandize kuchepetsa kuphulika kwa ma elekitironi kwa substrate. Chifukwa chake kutentha kwa substrate kumakhala kotsika, komwe ndi kwabwino kwambiri kwa ma substrate ena apulasitiki omwe sali olimbana ndi kutentha kwambiri.

5, Kudula pamwamba pa cholinga cha Magnetron sikofanana. Kudula pamwamba pa cholinga cha Magnetron sikofanana chifukwa cha mphamvu ya maginito yosafanana ya cholingacho. Malo omwe chiŵerengero cha kudula chili chachikulu, kotero kuti chiŵerengero chogwiritsira ntchito bwino cha cholingacho chili chochepa (chiŵerengero chogwiritsa ntchito cha 20-30%) chokha. Chifukwa chake, kuti pakhale kugwiritsa ntchito bwino mphamvu ya maginito, kugawa mphamvu ya maginito kuyenera kusinthidwa mwanjira zina, kapena kugwiritsa ntchito maginito oyenda mu cathode kungathandizenso kugwiritsa ntchito mphamvu ya maginito.

6、Cholinga cha Composite. Chingathe kupanga filimu ya aloyi yophimba chandamale. Pakadali pano, njira yogwiritsira ntchito magnetron target sputtering yakhala ikupakidwa bwino pa Ta-Ti alloy, (Tb-Dy)-Fe ndi Gb-Co alloy film. Kapangidwe ka chandamale chophatikizana kali ndi mitundu inayi, motsatana, ndi chozungulira chopindika, chapakati chopindika, chaching'ono chopindika ndi chapakati chopindika. Kugwiritsa ntchito kapangidwe ka chandamale chopindika ndikwabwino.

7. Ntchito zosiyanasiyana. Njira yothira ma magnetron imatha kuyika zinthu zambiri, zomwe zimafala kwambiri ndi izi: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti, Zr, SiO, AlO, GaAs, U, W, SnO, ndi zina zotero.

Kupaka utoto wa Magnetron ndi njira imodzi yomwe imagwiritsidwa ntchito kwambiri popanga mafilimu apamwamba. Ndi cathode yatsopano, imagwiritsa ntchito kwambiri komanso imayika mwachangu. Njira yopaka utoto wa Guangdong Zhenhua Technology vacuum magnetron tsopano ikugwiritsidwa ntchito kwambiri popanga utoto wa substrates zazikulu. Njirayi siigwiritsidwa ntchito kokha popanga filimu yokhala ndi gawo limodzi, komanso popanga utoto wa filimu yokhala ndi zigawo zambiri, kuphatikiza apo, imagwiritsidwanso ntchito mu njira yopaka utoto wa filimu yopaka utoto, filimu yowala, lamination ndi zina zopaka utoto wa filimu.