He kūpono loa ka vacuum magnetron sputtering no nā uhi waiho reactive. ʻOiaʻiʻo, hiki i kēia kaʻina hana ke waiho i nā ʻili lahilahi o kekahi oxide, carbide, a me nā mea nitride. Eia kekahi, kūpono loa ke kaʻina hana no ka waiho ʻana o nā ʻano kiʻiʻoniʻoni multilayer, me nā hoʻolālā optical, nā kiʻiʻoniʻoni kala, nā uhi pale ʻaʻahu, nā nano-laminates, nā uhi superlattice, nā kiʻiʻoniʻoni insulating, a pēlā aku. I ka makahiki 1970, ua hoʻomohala ʻia nā hiʻohiʻona waiho kiʻiʻoniʻoni optical kiʻekiʻe no nā ʻano mea papa kiʻiʻoniʻoni optical. ʻO kēia mau mea e komo pū me nā mea conductive transparent, semiconductors, polymers, oxides, carbides, a me nitrides, ʻoiai hoʻohana ʻia nā fluorides i nā kaʻina hana e like me ka uhi evaporative.
ʻO ka pōmaikaʻi nui o ke kaʻina hana magnetron sputtering ka hoʻohana ʻana i nā kaʻina hana uhi reactive a non-reactive paha e waiho i nā papa o kēia mau mea a me ka kaohi maikaʻi ʻana i ka haku mele papa, ka mānoanoa o ke kiʻiʻoniʻoni, ke ʻano like o ka mānoanoa o ke kiʻiʻoniʻoni a me nā waiwai mechanical o ka papa. Loaʻa i ke kaʻina hana nā ʻano penei.
1, Ka nui o ka hoʻokahe ʻana. Ma muli o ka hoʻohana ʻana i nā electrodes magnetron wikiwiki, hiki ke loaʻa kahi kahe ion nui, e hoʻomaikaʻi pono ana i ka nui o ka hoʻokahe ʻana a me ka nui o ka sputtering o kēia kaʻina hana uhi. Ke hoʻohālikelike ʻia me nā kaʻina hana uhi sputtering ʻē aʻe, he kiʻekiʻe ka mana o ka magnetron sputtering a me ka hua kiʻekiʻe, a hoʻohana nui ʻia i nā hana ʻoihana like ʻole.
2, ka mana kiʻekiʻe. ʻO ka pahuhopu sputtering Magnetron maʻamau ke koho i ke anakahi uila i loko o ka laulā o 200V-1000V, ʻo 600V ka maʻamau, no ka mea, ʻo ke anakahi uila o 600V aia wale nō i loko o ka laulā kiʻekiʻe loa o ka mana pono.
3. Ikehu sputtering haʻahaʻa. Hoʻopili haʻahaʻa ʻia ke volta magnetron target, a hoʻopaʻa ke kahua magnetic i ka plasma kokoke i ka cathode, ka mea e pale ai i nā ʻāpana i hoʻopiʻi ʻia me ka ikehu kiʻekiʻe mai ka hoʻokuʻu ʻana ma luna o ka substrate.
4, Haʻahaʻa ka mahana o ka substrate. Hiki ke hoʻohana ʻia ka anode e alakaʻi aku i nā electrons i hana ʻia i ka wā o ka hoʻokuʻu ʻana, ʻaʻohe pono o ke kākoʻo substrate e hoʻopau, hiki ke hōʻemi pono i ka hoʻouka ʻana o ka electron o ka substrate. No laila, haʻahaʻa ka mahana o ka substrate, he mea kūpono loa ia no kekahi mau substrates plastik i kū ʻole i ka uhi wela kiʻekiʻe.
5, ʻAʻole like ke ʻano o ke kahakaha ʻana o ka ʻili o ka pahuhopu Magnetron. ʻO ke ʻano like ʻole o ke kahakaha ʻana o ka ʻili o ka pahuhopu Magnetron ke kumu o ke kahua magnetic like ʻole o ka pahuhopu. ʻOi aku ka nui o ka wahi o ka helu kahakaha ʻana o ka pahuhopu, no laila he haʻahaʻa ka helu hoʻohana pono o ka pahuhopu (20-30% wale nō ka helu hoʻohana). No laila, no ka hoʻomaikaʻi ʻana i ka hoʻohana ʻana o ka pahuhopu, pono e hoʻololi i ka hoʻolaha ʻana o ke kahua magnetic ma kekahi mau ʻano, a i ʻole hiki i ka hoʻohana ʻana i nā magnet e neʻe ana i loko o ka cathode ke hoʻomaikaʻi i ka hoʻohana ʻana o ka pahuhopu.
6, Pahuhopu Composite. Hiki ke hana i ka ʻili hui hoʻohuihui uhi ʻia. I kēia manawa, ua hoʻohana pono ʻia ke kaʻina hana sputtering magnetron composite ma ka Ta-Ti alloy, (Tb-Dy)-Fe a me ka Gb-Co alloy film. ʻEhā ʻano o ke ʻano o ka pahuhopu composite, ʻo ia hoʻi ka pahuhopu poepoe inlaid, ka pahuhopu square inlaid, ka pahuhopu square inlaid liʻiliʻi a me ka pahuhopu sector inlaid. ʻOi aku ka maikaʻi o ka hoʻohana ʻana i ka ʻano o ka pahuhopu sector inlaid.
7. ʻO nā noi ākea. Hiki i ke kaʻina hana sputtering Magnetron ke waiho i nā mea he nui, ʻo nā mea maʻamau: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti, Zr, SiO, AlO, GaAs, U, W, SnO, etc.
ʻO ka Magnetron sputtering kekahi o nā kaʻina hana uhi i hoʻohana nui ʻia e loaʻa ai nā kiʻiʻoniʻoni kiʻekiʻe. Me kahi cathode hou, loaʻa iā ia ka hoʻohana kiʻekiʻe o ka pahuhopu a me ka helu hoʻopaʻa kiʻekiʻe. Hoʻohana nui ʻia ke kaʻina hana uhi magnetron sputtering vacuum Guangdong Zhenhua Technology i ka uhi ʻana o nā substrates nui. ʻAʻole hoʻohana wale ʻia ke kaʻina hana no ka waiho ʻana o ka kiʻiʻoniʻoni papa hoʻokahi, akā no ka uhi ʻana o ka kiʻiʻoniʻoni multi-layer, eia kekahi, hoʻohana ʻia hoʻi i ke kaʻina hana ʻōwili e ʻōwili no ka kiʻiʻoniʻoni hoʻopili, kiʻiʻoniʻoni optical, lamination a me nā uhi kiʻiʻoniʻoni ʻē aʻe.
Ka manawa hoʻouna: Nov-07-2022