Ikoranabuhanga ryo Gutanga Ion Beam Rifashijwe

1. Ikoranabuhanga ryo gushyiramo icyuma gifasha mu gukurura ...kurura icyuma gifasha mu gukurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma gikurura icyuma

2. Gushyiramo icyuma gifasha mu gutunganya icyuma cya ion bishobora kunoza imiterere ya mashini ya filime, kongera igihe cyo kunanirwa, bikaba byiza cyane mu gutegura ogiside, karubide, cubic BN, TiB2, n'ibirahure bisa na diyama. Urugero, mu cyuma kidashyuha cya 1Cr18Ni9Ti, hakoreshejwe ikoranabuhanga rifasha mu gutunganya icyuma cya ion kugira ngo gikure filime ya 200nm Si3N4, ntibishobora gusa gukumira kugaragara kw'ibice bicika ku buso bw'ibikoresho, ahubwo binagabanya cyane umuvuduko w'ibice bicika ku ntege, kugira ngo byongere igihe cyo kuruhuka bifite uruhare runini.

3. Gushyira icyuma gifasha amashanyarazi kuri iyoni bishobora guhindura imiterere y'imbaraga za filime n'imiterere yayo ya kristale ihinduka. Urugero, gutegura filime ya Cr ifite 11.5keV Xe + cyangwa Ar + guturika ku buso bwa substrate, byagaragaye ko guhindura ubushyuhe bwa substrate, ingufu za ion za bombardment, iyoni na atome kugira ngo bigere ku gipimo cy'ibipimo, bishobora gutuma imbaraga zituruka ku mbaraga zo gukurura zijya ku ngufu zo gukanda, imiterere ya kristale ya filime nayo izatanga impinduka. Mu gihe hari igipimo runaka cyo kugera kuri iyoni kuri atome, guturika kwa ion beam assisted stepment bifite icyerekezo cyiza kuruta urwego rwa membrane rushyirwa mu guturika kw'umwuka w'ubushyuhe.

4. Gushyiramo imirasire ya ioni bishobora kongera ubushobozi bwo kurwanya ingese no kurwanya ogisijeni y'urukiramende. Bitewe n'ubucucike bw'imirasire ya ioni ifasha urwego rwa filime, kunoza imiterere y'aho filime iherereye cyangwa kurema imiterere idahinduka bitewe no kubura kw'imipaka y'ibinyampeke hagati y'uduce, ibyo bikaba byiza mu kongera ubushobozi bwo kurwanya ingese y'ibikoresho no kurwanya ogisijeni y'ubushyuhe bwinshi.

5. Gushyiramo imirasire ya iyoni bishobora guhindura imiterere ya electromagnetic ya filime no kunoza imikorere ya filime ntoya z'urumuri.

6. Gushyiramo iyoni hifashishijwe iyoni bituma habaho guhindura neza kandi ku buryo bwigenga ibipimo bijyanye no gushyiramo atome no gushyiramo iyoni, kandi bigatuma habaho gukorana kw'ibirahure bya mikorometero nke zifite imiterere ihamye ku ngufu nke za bombardment, kugira ngo hashobore guhingwa uduce duto dutandukanye ku bushyuhe bw'icyumba, hirindwa ingaruka mbi ku bikoresho cyangwa ibice by'ubuziranenge bishobora guterwa no kubivura ku bushyuhe bwinshi.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua