Kev Siv Tshuab Pab Txhawb Kev Tso Tawm Ion Beam

1. Cov txheej txheem ion beam pab deposition yog tus cwj pwm los ntawm kev sib txuas zoo ntawm daim nyias nyias thiab lub substrate, cov txheej membrane muaj zog heev. Kev sim qhia tau tias: ion beam-pab deposition ntawm adhesion dua li qhov adhesion ntawm thermal vapor deposition nce ntau zaus mus rau ntau pua zaus, qhov laj thawj yog vim ion bombardment ntawm qhov chaw ntawm cov nyhuv ntxuav, yog li ntawd lub hauv paus membrane interface los tsim cov qauv gradient interfacial, lossis hybrid hloov txheej, nrog rau kev txo qhov kev ntxhov siab ntawm daim nyias nyias.

2. Kev siv ion beam pab deposition tuaj yeem txhim kho cov khoom siv kho tshuab ntawm zaj duab xis, ua kom lub neej qaug zog ntev dua, tsim nyog rau kev npaj cov oxides, carbides, cubic BN, TiB2, thiab cov txheej txheem zoo li pob zeb diamond. Piv txwv li, hauv 1Cr18Ni9Ti cov hlau tiv taus cua sov ntawm kev siv cov thev naus laus zis ion-beam-pab deposition los loj hlob 200nm Si3N4 zaj duab xis, tsis yog tsuas yog tuaj yeem tiv thaiv kev tshwm sim ntawm cov kab nrib pleb qaug zog ntawm qhov chaw ntawm cov khoom siv, tab sis kuj tseem txo qhov nrawm ntawm kev sib kis ntawm cov kab nrib pleb qaug zog, kom ntev nws lub neej muaj lub luag haujlwm zoo.

3. Ion beam pab deposition tuaj yeem hloov qhov xwm txheej ntawm zaj duab xis thiab nws cov qauv crystalline hloov pauv. Piv txwv li, kev npaj Cr zaj duab xis nrog 11.5keV Xe + lossis Ar + bombardment ntawm qhov chaw substrate, pom tias kev hloov kho ntawm qhov kub ntawm substrate, bombardment ion zog, ions thiab atoms kom ncav cuag qhov piv ntawm cov kev cai, tuaj yeem ua rau kev ntxhov siab los ntawm tensile kev ntxhov siab rau kev ntxhov siab compressive, cov qauv crystalline ntawm zaj duab xis kuj tseem yuav tsim kev hloov pauv. Nyob rau hauv qee qhov ion-rau-atom tuaj txog piv, ion beam pab deposition muaj kev xaiv zoo dua li cov txheej membrane tso los ntawm thermal vapor deposition.

4. Kev siv ion beam pab tso cov khoom tuaj yeem ua kom cov khoom tiv taus corrosion thiab oxidation tsis kam ntawm daim nyias nyias. Vim yog qhov ntom ntawm cov ion beam pab tso cov zaj duab xis, cov qauv ntawm cov zaj duab xis interface yuav zoo dua lossis tsim cov amorphous state los ntawm kev ploj ntawm cov ciam teb ntawm cov khoom me me, uas ua rau cov khoom tiv taus corrosion zoo dua thiab tiv taus oxidation ntawm qhov kub siab.

5. Kev siv cov ion beam pab tso tawm tuaj yeem hloov cov khoom siv electromagnetic ntawm zaj duab xis thiab txhim kho kev ua tau zoo ntawm cov yeeb yaj kiab nyias nyias.

6. Kev tso tawm ion-assisted tso cai rau kev hloov kho kom raug thiab ywj pheej ntawm cov kev ntsuas cuam tshuam nrog atomic deposition thiab ion implantation, thiab tso cai rau kev tsim cov txheej txheem ntawm ob peb micrometers nrog cov khoom sib xws ntawm lub zog qis bombardment, yog li ntau yam zaj duab xis nyias tuaj yeem loj hlob ntawm chav tsev kub, zam kev cuam tshuam tsis zoo rau cov ntaub ntawv lossis cov khoom precision uas yuav tshwm sim los ntawm kev kho lawv ntawm qhov kub siab.

– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua