Ion Beam Yafashijwe Ikoranabuhanga ryo Kubitsa

1. Ubushakashatsi bwerekana:

. Kurugero, muri 1Cr18Ni9Ti ibyuma birwanya ubushyuhe ku ikoreshwa rya tekinoroji ya ion-beam ifashwa nogukoresha kugirango ikure firime 200nm Si3N4, ntibishobora gusa kubuza ko havuka ibice byumunaniro hejuru yibikoresho, ariko kandi bigabanya cyane umuvuduko wo gukwirakwiza umunaniro, kugirango ubuzima bwayo bugire uruhare runini.

3. Ion beam ifashwa kubitsa irashobora guhindura imiterere ya firime kandi imiterere yayo ya kristu. Kurugero, gutegura firime ya Cr hamwe na 11.5keV Xe + cyangwa Ar + ibisasu hejuru yubutaka bwa substrate, yasanze ihinduka ryubushyuhe bwa substrate, ingufu za ion bombardion, ion na atome kugirango bigere ku kigereranyo cyibipimo, bishobora gutuma imihangayiko ituruka kumaganya akomeye kugeza guhangayika, imiterere ya kristu ya firime nayo izatanga impinduka. Munsi yikigereranyo cya ion-to-atom igeze, ion beam ifashwa kubitsa ifite icyerekezo cyiza cyo guhitamo kuruta icyerekezo cya membrane cyashyizwe mumashanyarazi.

4.Ibiti bifashwa kubitsa birashobora kongera imbaraga zo kurwanya ruswa no kurwanya okiside ya membrane. Bitewe n'ubucucike bwa ion beam ifashwa no gushira kumurongo wa firime, imiterere yimiterere yimiterere ya firime kunoza cyangwa gushiraho leta ya amorphous iterwa no kubura imipaka yintete hagati yibi bice, bifasha mukuzamura kwangirika kwangirika kwibintu no kurwanya okiside yubushyuhe bwo hejuru.

5. Ion beam ifashwa kubitsa irashobora guhindura imiterere ya electromagnetic ya firime kandi igateza imbere imikorere ya firime nziza.

6. Ion ifashwa na Ion ituma ihinduka ryigenga kandi ryigenga ryibipimo bijyanye no guterwa kwa atome no guterwa ion, kandi bikemerera kubyara ibisekuruza bikurikirana bya micrometero nkeya bifite imiterere ihamye ku mbaraga nkeya za bombe, kugirango firime zitandukanye zoroshye zishobora guhingwa mubushyuhe bwicyumba, birinda ingaruka mbi kubikoresho cyangwa ibice byuzuye bishobora guterwa no kubivura mubushyuhe bwo hejuru.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua