Ikoranabuhanga rya CVD rifite ibimenyetso bikurikira:
1. Igikorwa cyo gutunganya ibikoresho bya CVD biroroshye kandi byoroshye, kandi birashobora gutegura firime imwe cyangwa igizwe na firime hamwe na firime ivanze hamwe nuburyo butandukanye;
2. CVD itwikiriye ifite uburyo bwinshi bwo gukoresha, kandi irashobora gukoreshwa mugutegura ibyuma bitandukanye cyangwa ibyuma bya firime;
3. Umusaruro mwinshi bitewe nigipimo cyo kubitsa kuva kuri microne nkeya kugeza kuri microni kumunota kumunota;
4. Ugereranije nuburyo bwa PVD, CVD ifite imikorere myiza yo gutandukana kandi irakwiriye cyane gutwikira insimburangingo zifite imiterere igoye, nk'imyobo, umwobo utwikiriwe, ndetse n'inzu zihumye. Ipitingi irashobora gushirwa muri firime hamwe nubwitonzi bwiza. Bitewe n'ubushyuhe bwo hejuru mugihe cyo gukora firime, hamwe no gufatana gukomeye kumurongo wa substrate ya firime, layer ya firime irakomeye cyane
5. Ibyangiritse biterwa nimirasire ni bike kandi birashobora guhuzwa na MOS ihuza inzira.
—— Iyi ngingo yasohowe na Guangdong Zhenhua, aimashini ikora imashini
Igihe cyo kohereza: Werurwe-29-2023

