The makina zimatha nembanemba wosanjikiza amakhudzidwa ndi adhesion, nkhawa, aggregation kachulukidwe, etc. Kuchokera paubwenzi pakati pa nembanemba wosanjikiza zakuthupi ndi ndondomeko zinthu, tingaone kuti ngati tikufuna kusintha mphamvu mawotchi a nembanemba wosanjikiza, tiyenera kuganizira magawo ndondomeko zotsatirazi:
(1) mulingo wa vacuum. Vuto la filimuyi likuwonekera kwambiri. Zizindikiro zambiri za filimuyi zimadalira kwambiri mulingo wa vacuum. Kawirikawiri, pamene digiri ya vacuum ikuwonjezeka, kachulukidwe ka filimuyi akuwonjezeka, kulimba kumawonjezeka, mawonekedwe a filimu amawongoleredwa bwino, mankhwala ake amakhala oyera, koma nthawi yomweyo kupanikizika kumawonjezeka.
(2) Mlingo wa kuika. Kusintha mlingo mafunsidwe osati angagwiritsidwe ntchito kusintha evaporation mlingo, ndiko, kuonjezera evaporation gwero kutentha njira, angagwiritsidwenso ntchito kuonjezera evaporation gwero m'dera njira kukwaniritsa, koma ntchito evaporation gwero kuonjezera kutentha kwa njira ali ndi zovuta zake: kupanga nembanemba wosanjikiza maganizo ndi lalikulu kwambiri; mpweya wopangira mafilimu ndi wosavuta kuwola. Choncho nthawi zina kuwonjezera evaporation gwero malo kuposa kusintha evaporation gwero kutentha ndi yabwino.
(3) kutentha kwa gawo lapansi. Kuonjezera gawo lapansi kutentha ndi yabwino adsorption pa gawo lapansi pamwamba pa otsala mamolekyulu mpweya kusaganizira, kuonjezera gawo lapansi ndi kumanga mphamvu pakati pa mamolekyulu waikamo: pa nthawi yomweyo kulimbikitsa kutembenuka kwa thupi adsorption kwa mankhwala adsorption, kumapangitsanso kugwirizana pakati pa mamolekyu, kotero kuti nembanemba wosanjikiza dongosolo ndi zolimba. Mwachitsanzo, Mg, nembanemba, gawo lapansi Kutentha kwa 250 ~ 300 ℃ akhoza kuchepetsa nkhawa mkati, kusintha kachulukidwe kachulukidwe, kuonjezera kuuma kwa nembanemba wosanjikiza: gawo lapansi Kutentha kwa 120 ~ 150 ℃ okonzeka Zr03-Si02, multilayer nembanemba, makina mphamvu zake zawonjezeka kwambiri, koma ndipamwamba kwambiri kutentha ndi nembanemba.
(4) Kuphulitsa mabomba kwa ayoni. Kuphulika kwa ion kumakhudza mapangidwe a malo ogwirizana kwambiri, kuuma kwa pamwamba, makutidwe ndi okosijeni ndi kachulukidwe. The bombardment pamaso ❖ kuyanika akhoza kuyeretsa pamwamba ndi kuonjezera adhesion; bombardment pambuyo ❖ kuyanika akhoza kusintha filimu wosanjikiza kachulukidwe kachulukidwe, etc., motero kuwonjezera mphamvu mawotchi ndi kuuma.
(5) Kuyeretsa pansi. Njira yapansi panthaka kuyeretsa sikoyenera kapena si koyera, mu gawo lapansi zotsalira zotsalira kapena kuyeretsa wothandizila, ndiye chifukwa choipitsa latsopano, mu ❖ kuyanika osiyana kugwirizana zinthu ndi adhesion, zimakhudza woyamba wosanjikiza wa katundu structural ndi makulidwe kuwala, komanso kupanga filimu wosanjikiza n'zosavuta kubwera kuchokera gawo lapansi, motero kusintha makhalidwe a filimu wosanjikiza.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: May-04-2024

