Teknụzụ mkpuchi Vacuum bụ teknụzụ nke na-edobe ihe nkiri dị mkpa n'elu ihe ndị dị n'okpuru oghere, nke a na-ejikarị na ngwa elektrọn, ngwa anya, nkwakọ, ịchọ mma na mpaghara ndị ọzọ. Enwere ike kewaa akụrụngwa mkpuchi oghere n'ụdị ndị a:
1. Thermal evaporation mkpuchi ngwá: nke a bụ ihe kasị omenala agụụ mkpuchi usoro, site na kpo oku mkpa film ihe na evaporation ụgbọ mmiri, ihe na-epupụta na-edebe n'elu elu nke mkpụrụ ihe.
2. Ngwunye mkpuchi mkpuchi: na-eji ion ike dị elu na-akụ n'elu ihe a na-achọsi ike, a na-atụgharị ihe ndị a na-atụ anya ya ma tinye ya na ihe ntinye. Magnetron sputtering na-enwe ike nwetakwuo edo na ike adhesion nke ihe nkiri, adabara uka mmepụta.
3.Ion beam deposition equipment: Ion beams na-eji na-edebe mkpa film ihe n'elu mkpụrụ. Usoro a nwere ike nweta ihe nkiri na-edochaghị anya ma dabara adaba maka oge nwere oke achọrọ, mana ọnụahịa akụrụngwa dị elu.
4. Chemical Vapor Deposition (CVD) Akụrụngwa: Na-emepụta ihe nkiri dị mkpa n'elu ihe nke mkpụrụ osisi site na mmeghachi omume kemịkal. Usoro a nwere ike ịkwadebe ihe nkiri dị elu, nke dị iche iche, ma akụrụngwa dị mgbagwoju anya ma dị oke ọnụ.
5. Molecular Beam Epitaxy (MBE) akụrụngwa: Nke a bụ usoro nke ịchịkwa uto nke ihe nkiri dị mkpa na ọkwa atomic na a na-ejikarị eme ihe maka nkwadebe nke ultra-thin layers na multilayer structures maka semiconductor na nanotechnology ngwa.
6. Plasma Enhanced Chemical Vapor Deposition (PECVD): Nke a bụ usoro na-eji plasma na-eme ka ntinye nke ihe nkiri dị mkpa site na mmeghachi omume kemịkalụ, na-enye ohere ịmepụta ngwa ngwa nke ihe nkiri dị mkpa na obere okpomọkụ.
7. Ngwaọrụ Laser Deposition (PLD) : Ndị a na-eji ọkụ ọkụ laser ike dị elu na-egbu ihe mgbaru ọsọ, na-ekpochapụ ihe dị n'elu ebe a na-achọsi ike ma tinye ya na mkpụrụ, ma dabara adaba maka ịmepụta ihe nkiri oxide dị mgbagwoju anya.
Onye ọ bụla n'ime ngwaọrụ ndị a nwere njirimara nke ya na nhazi na ịrụ ọrụ ma dị mma maka ngwa ụlọ ọrụ dị iche iche na mpaghara nyocha. Site na mmepe nke teknụzụ, teknụzụ mkpuchi ikuku na-aga n'ihu, na akụrụngwa mkpuchi ikuku ọhụrụ na-apụtakwa.
–E wepụtara akụkọ aigwe mkpuchi ikukuemeputa Guangdong Zhenhua
Oge nzipu: Jun-12-2024
