Usoro Ụzọ iji kwalite Ike Mechanical nke Layer Film

The n'ibu Njirimara nke akpụkpọ ahụ oyi akwa na-emetụta adhesion, nchekasị, aggregation njupụta, wdg Site na mmekọrịta dị n'etiti akpụkpọ anụ oyi akwa ihe na usoro ihe, ọ pụrụ ịhụ na ọ bụrụ na anyị chọrọ imeziwanye n'ibu ike nke akpụkpọ ahụ oyi akwa, anyị kwesịrị ilekwasị anya na ndị na-esonụ usoro parameters:

(1) ọkwa agụụ. Vacuum na arụmọrụ nke ihe nkiri ahụ doro anya. Ọtụtụ n'ime ihe ngosi arụmọrụ nke oyi akwa ihe nkiri na-adabere na ọkwa agụụ. Na-emekarị, ka ogo nke agụụ na-abawanye, njupụta nchịkọta ihe nkiri na-abawanye, nkwụsi ike na-abawanye, usoro ihe nkiri ahụ na-emeziwanye, ihe mejupụtara kemịkal na-adị ọcha, ma n'otu oge ahụ nrụgide na-abawanye.

(2) Ọnụ ego nkwụnye ego. Melite deposition ọnụego ọ bụghị nanị na a ga-eji na-emeziwanye evaporation ọnụego, ya bụ, dịkwuo evaporation isi iyi okpomọkụ obibia, nwekwara ike na-eji na-amụba evaporation isi iyi ebe obibia iji nweta, ma ojiji nke evaporation isi iyi dịkwuo okpomọkụ nke obibia nwere ya drawbacks: mee ka akpụkpọ ahụ oyi akwa nrụgide bụ oke ibu; gas na-emepụta ihe nkiri dị mfe ire ere. Ya mere, mgbe ụfọdụ na-abawanye na evaporation isi iyi ka imeziwanye evaporation isi okpomọkụ ka mma.

(3) substrate okpomọkụ. Mmụba nke mkpụrụ okpomọkụ dị mma maka adsorption n'elu mkpụrụ nke mkpụrụ ndụ gas fọdụrụnụ ka ewepu, mụbaa mkpụrụ na ike njikọ dị n'etiti mkpụrụ ndụ echekwabara: n'otu oge ahụ ga-akwalite ntụgharị nke adsorption anụ ahụ na mgbasa ozi kemịkalụ, na-eme ka mmekọrịta dị n'etiti ụmụ irighiri ihe, nke mere na nhazi nke akpụkpọ ahụ siri ike. Dị ka ihe atụ, Mg, akpụkpọ ahụ, substrate kpo oku 250 ~ 300 ℃ nwere ike ibelata esịtidem nchegbu, melite aggregation njupụta, dịkwuo ike nke akpụkpọ ahụ oyi akwa: mkpụrụ kpo oku ka 120 ~ 150 ℃ kwadebere Zr03-Si02, multilayer akpụkpọ ahụ, ya n'ibu ike na-eme ka a otutu, ma substrate okpomọkụ bụ oke oyi akwa.

(4) ion bọmbụ. Ion bombardment nwere mmetụta na nguzobe nke ukwuu jikọrọ ọnụ na elu, elu roughness, oxidation na aggregation njupụta. Mgbochi ahụ tupu mkpuchi nwere ike ihicha elu ma mee ka adhesion dịkwuo elu; ogbunigwe mgbe mkpuchi nwere ike imeziwanye njupụta nchịkọta ihe nkiri oyi akwa, wdg, si otú ahụ na-abawanye ike na ike n'ibu.

(5) ihicha mkpụrụ. Mkpụrụ ihicha usoro adịghị mma ma ọ bụ na-adịghị ọcha, na mkpụrụ ihe fọdụrụ adịghị ọcha ma ọ bụ ihicha gị n'ụlọnga, mgbe ahụ na-eme ka ọhụrụ mmetọ, na mkpuchi nke dị iche iche cohesion ọnọdụ na adhesion, na-emetụta akpa oyi akwa nke structural Njirimara na ngwa anya ọkpụrụkpụ, ma na-eme ka film oyi akwa dị mfe pụta site na mkpụrụ, si otú na-agbanwe àgwà nke film oyi akwa.

–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua