Nqus txheej tshuab yog ib lub tshuab uas tso cov ntaub ntawv nyias nyias mus rau saum npoo ntawm cov khoom siv hauv qab lub tshuab nqus tsev, uas yog siv dav hauv electronics, optics, ntim, kho kom zoo nkauj thiab lwm yam. Cov khoom siv lub tshuab nqus tsev tuaj yeem muab faib ua ntau hom hauv qab no:
1. Thermal evaporation txheej cov cuab yeej: qhov no yog ib txwm siv lub tshuab nqus tsev txheej txheej, los ntawm cua sov cov ntaub ntawv nyias nyias hauv lub nkoj evaporation, cov khoom yog evaporated thiab tso rau saum npoo ntawm cov khoom siv substrate.
2. Sputtering txheej cov cuab yeej: siv lub zog ions los ntaus rau saum npoo ntawm cov khoom siv, cov khoom siv atoms yog sputtered thiab tso rau hauv cov khoom siv substrate. Magnetron sputtering muaj peev xwm tau txais ntau yam sib xws thiab muaj zog adhesion ntawm zaj duab xis, haum rau ntau lawm.
3.Ion beam deposition khoom: Ion beams yog siv los tso cov ntaub ntawv nyias nyias mus rau substrate. Txoj kev no tuaj yeem tau txais cov yeeb yaj kiab zoo sib xws thiab tsim nyog rau lub sijhawm nrog cov kev xav tau siab, tab sis cov cuab yeej siv tau siab.
4. Chemical Vapor Deposition (CVD) Cov Khoom Siv: Cov ntaub ntawv nyias nyias ntawm cov khoom siv substrate los ntawm cov tshuaj tiv thaiv. Txoj kev no tuaj yeem npaj cov yeeb yaj kiab zoo, ntau hom yeeb yaj kiab, tab sis cov cuab yeej siv tau yooj yim thiab kim.
5. Molecular Beam Epitaxy (MBE) cov cuab yeej: Qhov no yog ib txoj hauv kev los tswj kev loj hlob ntawm cov yeeb yaj kiab nyias ntawm qib atomic thiab feem ntau yog siv rau kev npaj cov txheej txheej ultra-thin thiab multilayer qauv rau kev siv semiconductor thiab nanotechnology.
6. Plasma Enhanced Chemical Vapor Deposition (PECVD) cov cuab yeej: Qhov no yog cov txheej txheem uas siv cov plasma los txhim kho qhov tso tawm ntawm cov yeeb yaj kiab nyias los ntawm cov tshuaj tiv thaiv, tso cai rau kev tsim sai ntawm cov yeeb yaj kiab nyias ntawm qhov kub thiab txias.
7. Pulsed Laser Deposition (PLD) cov khoom siv: Cov no siv lub zog laser pulses los tawm tsam lub hom phiaj, evaporate cov ntaub ntawv los ntawm lub hom phiaj nto thiab tso nws mus rau lub substrate, thiab yog tsim rau loj hlob zoo, complex oxide films.
Txhua yam ntawm cov khoom siv no muaj nws tus yam ntxwv hauv kev tsim thiab kev ua haujlwm thiab tsim nyog rau cov kev siv sib txawv thiab kev tshawb fawb. Nrog rau kev txhim kho thev naus laus zis, lub tshuab nqus tsev txheej tshuab kuj tseem ua tiav, thiab cov khoom siv tshuab nqus tsev tshiab kuj tau tshwm sim.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuabChaw tsim tshuaj paus Guangdong Zhenhua
Post lub sij hawm: Jun-12-2024