(3) I-Radio Frequency Plasma CVD (RFCVD) I-RF ingasetshenziswa ukukhiqiza i-plasma ngezindlela ezimbili ezahlukene, indlela yokuhlanganisa i-capacitive kanye nendlela yokuhlanganisa i-inductive. I-RF plasma CVD isebenzisa imvamisa engu-13.56 MHz. Inzuzo ye-RF plasma ukuthi isakazeka endaweni enkulu kakhulu kune-microwave plasma. Kodwa-ke, ukulinganiselwa kwe-RF capacitively coupled plasma ukuthi imvamisa ye-plasma ayifaneleki kahle ekuqhumeni, ikakhulukazi uma i-plasma iqukethe i-argon. I-plasma ehlanganiswe nge-capacitively ayifanele ukukhulisa amafilimu edayimane asezingeni eliphezulu njengoba ukuqhunyiswa kwe-ion kusuka ku-plasma kungaholela ekulimaleni okukhulu kwedayimane. Amafilimu edayimane e-polycrystalline akhuliswe kusetshenziswa i-RF induced plasma ngaphansi kwezimo zokubeka ezifana ne-microwave plasma CVD. Amafilimu edayimane epitaxial ahambisanayo nawo atholakale kusetshenziswa i-RF-induced plasma-enhanced CVD.
(4) I-DC Plasma CVD
I-DC plasma ingenye indlela yokusebenzisa umthombo wegesi (ngokuvamile ingxube ye-H2, kanye negesi ye-hydrocarbon) yokukhula kwefilimu yedayimane. I-DC plasma-assisted CVD inamandla okukhulisa izindawo ezinkulu zamafilimu edayimane, futhi ubukhulu bendawo yokukhula bunqunyelwe kuphela ngobukhulu bama-electrode kanye nokunikezwa kwamandla kwe-DC. Enye inzuzo ye-DC plasma-assisted CVD ukwakheka komjovo we-DC, futhi amafilimu edayimane ajwayelekile atholwe yilolu hlelo afakwa ngesilinganiso esingu-80 mm/h. Ngaphezu kwalokho, njengoba izindlela ezahlukene ze-DC arc zingabeka amafilimu edayimane asezingeni eliphezulu ezindaweni ezingezona ezedayimane ngamanani aphezulu okufakwa, zinikeza indlela yokuthengisa yokufakwa kwamafilimu edayimane.
(5) I-electron cyclotron resonance microwave plasma enhanced chemical vapor deposition (ECR-MPECVD) I-DC plasma, i-RF plasma, kanye ne-microwave plasma echazwe ngaphambilini konke kuhlukanisa futhi kubole i-H2, noma ama-hydrocarbon, kube amaqembu e-athomu ye-hydrogen kanye ne-carbon-hydrogen, ngaleyo ndlela kunegalelo ekwakhiweni kwamafilimu amancane edayimane. Njengoba i-electron cyclotron resonance plasma ingakhiqiza i-plasma enobuningi obuphezulu (>1x1011cm-3), i-ECR-MPECVD ifaneleka kakhulu ekukhuleni nasekubekweni kwamafilimu edayimane. Kodwa-ke, ngenxa yokucindezela kwegesi okuphansi (10-4- kuya ku-10-2 Torr) okusetshenziswa enqubweni ye-ECR, okuholela esilinganisweni esiphansi sokubekwa kwamafilimu edayimane, le ndlela okwamanje ifaneleka kuphela ekubekweni kwamafilimu edayimane elabhorethri.
–Lesi sihloko sikhishwe ngumkhiqizi wemishini yokumboza nge-vacuum uGuangdong Zhenhua
Isikhathi sokuthunyelwe: Juni-19-2024