ʻEnehana ʻili lahilahi daimana-mokuna2

(3) Radio Frequency Plasma CVD (RFCVD) Hiki ke hoʻohana ʻia ka RF e hana i ka plasma ma o ʻelua mau ʻano like ʻole, ke ʻano hoʻopili capacitive a me ke ʻano hoʻopili inductive. Hoʻohana ka RF plasma CVD i ka alapine o 13.56 MHz. ʻO ka pōmaikaʻi o ka RF plasma, ʻo ia ka hoʻolaha ʻana ma luna o kahi ʻāpana nui aʻe ma mua o ka microwave plasma. Eia nō naʻe, ʻo ka palena o ka RF capacitively coupled plasma ʻaʻole kūpono ke alapine o ka plasma no ka sputtering, ʻoiai inā loaʻa ka argon i loko o ka plasma. ʻAʻole kūpono ka plasma capacitively coupled no ka ulu ʻana i nā kiʻiʻoniʻoni daimana kiʻekiʻe no ka mea hiki i ka ion bombardment mai ka plasma ke alakaʻi i ka hōʻino nui i ka daimana. Ua ulu ʻia nā kiʻiʻoniʻoni daimana Polycrystalline me ka hoʻohana ʻana i ka RF induced plasma ma lalo o nā kūlana deposition e like me ka microwave plasma CVD. Ua loaʻa pū nā kiʻiʻoniʻoni daimana epitaxial homogeneous me ka hoʻohana ʻana i ka RF-induced plasma-enhanced CVD.

(4) DC Plasma CVD

ʻO ka plasma DC kekahi ʻano hana ʻē aʻe no ka hoʻoulu ʻana i kahi kumu kinoea (ma ke ʻano he hui ʻana o H2, a me ke kinoea hydrocarbon) no ka ulu ʻana o ka ʻili daimana. Loaʻa i ka CVD i kōkua ʻia e ka plasma DC ka hiki ke ulu i nā wahi nui o nā ʻili daimana, a ʻo ka nui o ka wahi ulu e kaupalena wale ʻia e ka nui o nā electrodes a me ka lako mana DC. ʻO kekahi pono o ka CVD i kōkua ʻia e ka plasma DC ʻo ia ka hoʻokumu ʻia ʻana o kahi inikini DC, a ʻo nā ʻili daimana maʻamau i loaʻa e kēia ʻōnaehana e waiho ʻia ma ka wikiwiki o 80 mm/h. Eia kekahi, ʻoiai hiki i nā ʻano hana arc DC like ʻole ke waiho i nā ʻili daimana kiʻekiʻe ma nā substrates ʻaʻole daimana ma nā helu waiho kiʻekiʻe, hāʻawi lākou i kahi ʻano kūʻai aku no ka waiho ʻana o nā ʻili daimana.

(5) Hoʻonui ʻia ka hoʻokaʻawale ʻana o ka wai kemika i ka plasma microwave resonance electron cyclotron (ECR-MPECVD) ʻO ka plasma DC, RF plasma, a me ka microwave plasma i wehewehe ʻia ma mua e hoʻokaʻawale a hoʻokaʻawale i ka H2, a i ʻole hydrocarbons, i loko o nā hui atomic hydrogen a me nā hui atom carbon-hydrogen, a pēlā e kōkua ai i ka hoʻokumu ʻana o nā kiʻiʻoniʻoni lahilahi daimana. ʻOiai hiki i ka plasma resonance electron cyclotron ke hana i ka plasma density kiʻekiʻe (>1x1011cm-3), ʻoi aku ka kūpono o ECR-MPECVD no ka ulu ʻana a me ka waiho ʻana o nā kiʻiʻoniʻoni daimana. Eia nō naʻe, ma muli o ke kaomi kinoea haʻahaʻa (10-4- a i 10-2 Torr) i hoʻohana ʻia i ke kaʻina hana ECR, kahi e hopena ai i ka helu waiho haʻahaʻa o nā kiʻiʻoniʻoni daimana, kūpono wale ke ʻano i kēia manawa no ka waiho ʻana o nā kiʻiʻoniʻoni daimana i loko o ka hale hana.

–Ua hoʻokuʻu ʻia kēia ʻatikala e ka mea hana mīkini uhi hakahaka ʻo Guangdong Zhenhua