Ukadaulo wa mafilimu opyapyala a diamondi - mutu 2

(3) Radio Frequency Plasma CVD (RFCVD)RF ingagwiritsidwe ntchito kupanga plasma pogwiritsa ntchito njira ziwiri zosiyana, njira yolumikizira ya capacitive ndi njira yolumikizira ya inductive.RF plasma CVD imagwiritsa ntchito pafupipafupi ya 13.56 MHz. Ubwino wa RF plasma ndikuti imafalikira pamalo akulu kwambiri kuposa microwave plasma. Komabe, kuchepetsa kwa RF capacitively coupled plasma ndikuti pafupipafupi ya plasma sikoyenera kuphulika, makamaka ngati plasma ili ndi argon. Capacitively coupled plasma sikoyenera kukulitsa mafilimu apamwamba a diamondi popeza ion bombardment kuchokera ku plasma ikhoza kubweretsa kuwonongeka kwakukulu kwa diamondi. Mafilimu a diamondi a polycrystalline alimidwa pogwiritsa ntchito RF induced plasma pansi pa mikhalidwe yofanana ndi microwave plasma CVD. Mafilimu a diamondi a epitaxial ofanana nawo apezekanso pogwiritsa ntchito RF-induced plasma-enhanced CVD.

(4) DC Plasma CVD

Plasma ya DC ndi njira ina yoyatsira gwero la mpweya (nthawi zambiri chisakanizo cha H2, ndi mpweya wa hydrocarbon) kuti filimu ya diamondi ikule. CVD yothandizidwa ndi plasma ya DC imatha kukulitsa madera akuluakulu a mafilimu a diamondi, ndipo kukula kwa malo okulirako kumangodalira kukula kwa ma electrode ndi mphamvu ya DC. Ubwino wina wa CVD yothandizidwa ndi plasma ya DC ndi kupanga jakisoni wa DC, ndipo mafilimu a diamondi omwe amapezeka ndi dongosololi amayikidwa pamlingo wa 80 mm/h. Kuphatikiza apo, popeza njira zosiyanasiyana za DC arc zimatha kuyika mafilimu a diamondi apamwamba kwambiri pazigawo zopanda diamondi pamlingo wapamwamba woyika, zimapereka njira yogulitsira yoyika mafilimu a diamondi.

(5) Electron cyclotron resonance microwave plasma enhanced chemical vapor deposition (ECR-MPECVD)Ma plasma a DC, RF plasma, ndi microwave plasma zomwe zafotokozedwa kale zonse zimalekanitsa ndikuwononga H2, kapena ma hydrocarbons, kukhala magulu a atomu ya hydrogen ndi carbon-hydrogen, motero zimathandiza kupanga mafilimu opyapyala a diamondi. Popeza electron cyclotron resonance plasma imatha kupanga plasma yopyapyala kwambiri (>1x1011cm-3), ECR-MPECVD ndiyoyenera kwambiri kukula ndi kuyika mafilimu a diamondi. Komabe, chifukwa cha mpweya wotsika (10-4- mpaka 10-2 Torr) womwe umagwiritsidwa ntchito mu ECR process, zomwe zimapangitsa kuti mafilimu a diamondi aziyikidwa pang'ono, njirayi pakadali pano ndi yoyenera kuyika mafilimu a diamondi mu labotale.

–Nkhaniyi yatulutsidwa ndi wopanga makina opangira vacuum Guangdong Zhenhua