(3) Te Auautanga Reo Irirangi o te Matū CVD (RFCVD) Ka taea te whakamahi i te RF hei whakaputa i te matū mā roto i ngā tikanga e rua, te tikanga hononga capacitive me te tikanga hononga inductive. Ka whakamahia e te RF matū CVD te auau o te 13.56 MHz. Ko te painga o te matū RF ko tōna horapa ki runga i tētahi wāhi nui atu i te matū ngaruiti. Heoi, ko te herenga o te matū hono capacitive RF ko te kore e pai te auau o te matū mō te sputtering, inā koa mēnā kei roto i te matū he argon. Kāore te matū hono capacitive i te pai mō te whakatipu kiriata taimana kounga teitei nā te mea ka taea e te pupuhi katote mai i te matū te arahi ki te kino nui ki te taimana. Kua whakatipuhia ngā kiriata taimana polycrystalline mā te whakamahi i te matū i whakaohohia e te RF i raro i ngā tikanga whakatakotoranga rite ki te CVD matū ngaruiti. Kua whiwhihia hoki ngā kiriata taimana epitaxial homogeneous mā te whakamahi i te CVD whakarei ake i te matū i whakaohohia e te RF.
(4) DC Plasma CVD
Ko te plasma DC tētahi atu tikanga mō te whakahohe i tētahi pūtake hau (ko te nuinga he ranunga o te H2, me te hau warowaihā) mō te tipu o te kiriata taimana. Ka taea e te CVD āwhina-plasma DC te whakatipu i ngā wāhi nui o ngā kiriata taimana, ā, ko te rahi o te wāhi tipu ka herea noa e te rahi o ngā irahiko me te pūtake hiko DC. Ko tētahi atu painga o te CVD āwhina-plasma DC ko te hanganga o te werohanga DC, ā, ko ngā kiriata taimana noa e whiwhihia ana e tēnei pūnaha ka whakatakotoria i te tere o te 80 mm/h. Hei tāpiri, nā te mea ka taea e ngā tikanga pewa DC te whakatakoto i ngā kiriata taimana kounga teitei ki runga i ngā papa kore-taimana i ngā tere whakatakoto teitei, ka whakaratohia he tikanga hokohoko mō te whakatakoto i ngā kiriata taimana.
(5) Te whakapūtanga matū o te plasma ngaruiti irahiko (ECR-MPECVD) Ko te plasma DC, te plasma RF, me te plasma ngaruiti i whakaahuatia i mua ake nei ka wehea, ka whakapōrearea hoki i te H2, ngā warowaihā rānei, ki roto i ngā rōpū hauwai ngota me te ngota waro-hauwai, ā, ka whai wāhi ki te hanganga o ngā kiriata angiangi taimana. Nā te mea ka taea e te plasma whakapūtanga o te plasma ngaruiti irahiko te whakaputa i te plasma kiato teitei (>1x1011cm-3), he pai ake te ECR-MPECVD mō te tipu me te whakapūtanga o ngā kiriata taimana. Heoi, nā te iti o te pēhanga hau (10-4- ki te 10-2 Torr) e whakamahia ana i roto i te tukanga ECR, e hua ake ai he tere whakapūtanga iti o ngā kiriata taimana, ko te tikanga i tēnei wā he pai anake mō te whakapūtanga o ngā kiriata taimana i roto i te taiwhanga.
–Nā te kaihanga mīhini paninga korehau a Guangdong Zhenhua tēnei tuhinga i tuku
Wā tuku: Pipiri-19-2024