Ikoranabuhanga rya filime z'udupira duto twa diyama-igice cya 2

(3) Radio Frequency Plasma CVD (RFCVD)RF ishobora gukoreshwa mu gukora plasma hakoreshejwe uburyo bubiri butandukanye, uburyo bwo guhuza bwa capacitive na inductive coupling. RF plasma CVD ikoresha frequency ya 13.56 MHz. Akamaro ka RF plasma ni uko ikwirakwira ahantu hanini cyane kurusha plasma ya microwave. Ariko, imbogamizi ya RF capacitively coupled plasma ni uko frequency ya plasma idakwiye gukoreshwa mu gusuka, cyane cyane iyo plasma irimo argon. Plasma ya capacitively coupled plasma ntabwo ikwiriye guhingwa filime za diyama nziza kuko ikwirakwizwa rya ion riva muri plasma rishobora kwangiza cyane diyama. Filime za diyama za polycrystalline zakuze hakoreshejwe RF induced plasma mu bihe bisa na microwave plasma CVD. Filime za diyama za epitaxial epitaxial nazo zabonetse hakoreshejwe RF induced plasma-enhanced CVD.

(4) DC Plasma CVD

Plasma ya DC ni ubundi buryo bwo gukoresha isoko ya gaze (muri rusange ivanze na H2, na gaze ya hydrocarbon) kugira ngo filime ya diyama ikure. CVD ifashwa na plasma ya DC ifite ubushobozi bwo gukura ahantu hanini ha filime za diyama, kandi ingano y'agace gakuramo igengwa gusa n'ingano ya electrodes n'amashanyarazi ya DC. Indi nyungu ya CVD ifashwa na plasma ya DC ni ukurema inshinge ya DC, kandi filime zisanzwe za diyama ziboneka muri ubu buryo zishyirwa ku gipimo cya mm 80 / h. Byongeye kandi, kubera ko uburyo butandukanye bwa DC arc bushobora gushyira filime nziza za diyama ku bintu bitari diyama ku gipimo cyo hejuru cyo gushyiramo, butanga uburyo bwo kugurisha bwo gushyiramo filime za diyama.

(5) Electron cyclotron resonance microwave plasma enhanced chemical vapor deposition (ECR-MPECVD)Plasma ya DC, RF plasma, na microwave plasma byasobanuwe mbere byose bitandukanya H2, cyangwa hydrocarbons, bikavamo atome hydrogen na atome ya karuboni-hydrogen, bityo bigafasha mu ikorwa rya diyama thin films. Kubera ko electron cyclotron resonance plasma ishobora gukora plasma ifite ubucucike bwinshi (>1x1011cm-3), ECR-MPECVD ikwiriye cyane mu gukura no gushyira diyama films. Ariko, bitewe n'umuvuduko muke wa gaze (10-4- kugeza 10-2 Torr) ikoreshwa muri ECR, bigatuma diyama films zishyirwa hasi, ubu buryo bukwiriye gusa gushyira diyama films muri laboratwari.

–Iyi nkuru yasohotse n'uruganda rukora imashini zikora imashini zikoresha umwuka ushyushye Guangdong Zhenhua