(3) Enwere ike iji usoro abụọ dị iche iche mepụta plasma ugboro ugboro redio, usoro njikọ capacitive na usoro njikọ inductive. CVD plasma RF na-eji ugboro 13.56 MHz. Uru nke plasma RF bụ na ọ na-agbasa n'ebe buru ibu karịa plasma microwave. Agbanyeghị, mmachi nke plasma RF na-ejikọta nke ọma bụ na ugboro ugboro nke plasma adịghị mma maka ịgbasa, ọkachasị ma ọ bụrụ na plasma nwere argon. plasma ejikọtara nke ọma adabaghị maka itolite ihe nkiri diamond dị elu ebe ọ bụ na bọmbụ ion sitere na plasma nwere ike ibute nnukwu mmebi na diamond. A na-etolite ihe nkiri diamond polycrystalline site na iji plasma RF na-akpata n'okpuru ọnọdụ nkwụnye ego yiri CVD plasma microwave. Enwetawokwa ihe nkiri diamond epitaxial homogeneous site na iji CVD nke plasma emelitere RF.
(4) DC Plasma CVD
Plasma DC bụ ụzọ ọzọ isi mee ka isi iyi gas rụọ ọrụ (n'ozuzu ngwakọta nke H2, na gas hydrocarbon) maka uto ihe nkiri diamond. CVD nke enyere aka na plasma nke DC nwere ike itolite nnukwu mpaghara nke ihe nkiri diamond, nha nke mpaghara uto ahụ na-ejedebe naanị site na nha elektrọd na ike DC. Uru ọzọ nke CVD enyere aka na plasma nke DC bụ ịmepụta DC injection, a na-etinyekwa ihe nkiri diamond nkịtị nke sistemụ a na-enweta na ọnụego 80 mm/h. Na mgbakwunye, ebe ọ bụ na ụzọ DC arc dị iche iche nwere ike itinye ihe nkiri diamond dị elu na ihe ndị na-abụghị diamond na ọnụego nchekwa dị elu, ha na-enye ụzọ ahịa maka itinye ihe nkiri diamond.
(5) Electron cyclotron resonance microwave plasma enhanced chemical vapor deposition (ECR-MPECVD) A kọwara plasma DC, RF plasma, na microwave plasma na mbụ na-ekewa ma na-agbaze H2, ma ọ bụ hydrocarbons, ka ha bụrụ otu atọm hydrogen na carbon-hydrogen atọm, si otú a na-enye aka na mmepụta nke ihe nkiri diamond dị gịrịgịrị. Ebe ọ bụ na plasma electron cyclotron resonance nwere ike imepụta plasma dị elu (>1x1011cm-3), ECR-MPECVD dabara adaba maka uto na itinye ihe nkiri diamond. Agbanyeghị, n'ihi obere nrụgide gas (10-4- ruo 10-2 Torr) ejiri mee ihe na usoro ECR, nke na-ebute obere ọnụego itinye ihe nkiri diamond, usoro ahụ dị ugbu a naanị maka itinye ihe nkiri diamond na ụlọ nyocha.
–Ndị na-emepụta igwe mkpuchi ikuku Guangdong Zhenhua wepụtara akụkọ a
Oge ozi: Jun-19-2024