(3) I-Radio Frequency Plasma CVD (RFCVD) I-RF ingasetyenziselwa ukuvelisa i-plasma ngeendlela ezimbini ezahlukeneyo, indlela yokudibanisa i-capacitive kunye nendlela yokudibanisa i-inductive. I-RF plasma CVD isebenzisa i-frequency ye-13.56 MHz. Inzuzo ye-RF plasma kukuba isasazeka kwindawo enkulu kakhulu kune-microwave plasma. Nangona kunjalo, umda we-RF capacitively coupled plasma kukuba i-frequency ye-plasma ayifanelekanga ekutshizeni, ingakumbi ukuba i-plasma ine-argon. I-plasma edibeneyo nge-capacitively ayifanelekanga ekukhuliseni iifilimu zedayimani ezikumgangatho ophezulu kuba i-ion bombardment evela kwi-plasma inokukhokelela kumonakalo omkhulu kwidayimani. Iifilimu zedayimani ze-Polycrystalline zikhuliswe kusetyenziswa i-RF induced plasma phantsi kweemeko zokubeka ezifana ne-microwave plasma CVD. Iifilimu zedayimani ze-epitaxial ezihambelanayo nazo zifunyenwe kusetyenziswa i-RF-induced plasma-enhanced CVD.
(4) I-DC Plasma CVD
I-DC plasma yenye indlela yokuqalisa umthombo wegesi (ngokubanzi umxube we-H2, kunye negesi ye-hydrocarbon) yokukhula kwefilimu yedayimani. I-DC plasma-assisted CVD inamandla okukhulisa iindawo ezinkulu zeefilimu zedayimani, kwaye ubungakanani bendawo yokukhula bunqunyelwe kuphela bubungakanani bee-electrodes kunye nombane we-DC. Enye inzuzo ye-DC plasma-assisted CVD kukwenziwa kwe-DC injection, kwaye iifilimu zedayimani eziqhelekileyo ezifunyenwe yile nkqubo zifakwa ngesantya se-80 mm/h. Ukongeza, ekubeni iindlela ezahlukeneyo ze-DC arc zinokufaka iifilimu zedayimani ezikumgangatho ophezulu kwiindawo ezingezizo zedayimani ngamanani aphezulu okufaka, zibonelela ngendlela yokuthengisa yokufaka iifilimu zedayimani.
(5) I-electron cyclotron resonance microwave plasma ephuculweyo yokufunxwa komphunga wekhemikhali (ECR-MPECVD) I-DC plasma, i-RF plasma, kunye ne-microwave plasma ezichazwe ngaphambili zonke ziyahlukanisa kwaye zibolise i-H2, okanye ii-hydrocarbons, zibe ngamaqela e-athomu ye-hydrogen kunye ne-carbon-hydrogen, ngaloo ndlela zinegalelo ekwakhiweni kweefilimu ezincinci zedayimani. Ekubeni i-electron cyclotron resonance plasma inokuvelisa i-plasma enoxinano oluphezulu (>1x1011cm-3), i-ECR-MPECVD ifanelekile ngakumbi ekukhuleni nasekufunxweni kweefilimu zedayimani. Nangona kunjalo, ngenxa yoxinzelelo oluphantsi lwegesi (10-4- ukuya kwi-10-2 Torr) esetyenziswa kwinkqubo ye-ECR, ekhokelela kwizinga eliphantsi lokufunxwa kweefilimu zedayimani, le ndlela okwangoku ifanelekile kuphela ekufunxweni kweefilimu zedayimani kwilabhoratri.
–Eli nqaku likhutshwe ngumvelisi womatshini wokugquma nge-vacuum uGuangdong Zhenhua
Ixesha leposi: Juni-19-2024